Ethyltrichlorosilane
Ethyltrichlorosilane (CAS: 115-21-9, C2H5Cl3Si) is a highly reactive organosilicon compound with a molecular weight of 163.51 g/mol. This liquid chemical serves as a valuable intermediate in chemical synthesis and materials science. It is particularly utilised as a precursor in solution deposition processes for microelectronics and as a protecting or derivatizing reagent in organic chemistry. Its robust reactivity makes it a key component in specialised industrial applications.
- IUPAC
- Trichloro(ethyl)silane
Microelectronics Manufacturing
Ethyltrichlorosilane is employed as a precursor in solution deposition techniques for creating thin films in microelectronic device fabrication. Its controlled decomposition allows for the precise deposition of silicon-containing layers.
Chemical Synthesis
As a reactive intermediate, it is used in the synthesis of various organosilicon compounds. It functions as an ethylating agent and a source of silicon in organic reactions.
Materials Science
This compound finds application in materials science for the modification and synthesis of silicon-based materials with specific properties. It can be used to introduce ethyl groups onto material surfaces or into polymer structures.
Protecting and Derivatizing Reagent
Ethyltrichlorosilane acts as a reagent for protecting hydroxyl or other functional groups during complex organic syntheses. It can also be used to derivatize molecules for analytical purposes.
| Molecular weight | 163.51 |
|---|---|
| Empirical formula | C2H5Cl3Si |
| Assay | ≥98% (GC)≥99.99% (as metals) |
| Grade | deposition grade |
| Form | liquid |
| Boiling point | 99 °C(lit.) |
| Density | 1.238 g/mL at 25 °C(lit.) |
| Melting point | −106 °C(lit.) |
| Refractive index | n20/D 1.425(lit.) |
Hazard statements
- H225Highly flammable liquid and vapour
- H302Harmful if swallowed
- H314Causes severe skin burns and eye damage
- H331Toxic if inhaled
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P261Avoid breathing dust, fume, gas or vapours
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 14 °C / 57.2 °F |
| Transport (UN / ADR) | UN 1196 8(3) / PGII |
| Water hazard class (WGK, DE) | 1 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 11-14-20/22-35-37 |
| Safety statements (S) | 26-36/37/39-45 |
| Supplemental hazards | Corrosive to the respiratory tract., Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Ethyltrichlorosilane primarily used for?
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Ethyltrichlorosilane is primarily used in chemical synthesis, materials science, micro/nanoelectronics, and as a protecting and derivatizing reagent.
What are the CAS number and formula for Ethyltrichlorosilane?
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The CAS number for Ethyltrichlorosilane is 115-21-9, and its formula is C2H5Cl3Si.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Ethyltrichlorosilane in deposition grade, with an assay of ≥98% (GC) and ≥99.99% (as metals). We do not represent this product as USP, BP, or EP grade.
What are the main safety hazards associated with Ethyltrichlorosilane?
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Ethyltrichlorosilane is highly flammable and corrosive. It is harmful if swallowed and toxic if inhaled. It reacts violently with water, posing a significant hazard. Appropriate personal protective equipment, including respiratory protection and chemical-resistant gloves, is essential.
How is Ethyltrichlorosilane packed, shipped, and exported?
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Ethyltrichlorosilane is packed, shipped, and exported according to strict international regulations for hazardous materials, ensuring safe transit. UN 1196, 8(3), Packing Group II.
How can I request a quote or sample of Ethyltrichlorosilane?
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To request a quote or sample of Ethyltrichlorosilane, please contact our sales team through the TSS website or by phone.
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