Ethyltrimethoxysilane
Ethyltrimethoxysilane (CAS: 5314-55-6), with the chemical formula C2H5Si(OCH3)3 and a molecular weight of 150.25 g/mol, is a clear liquid organosilicon compound. It serves as a valuable intermediate in chemical synthesis and is widely used in materials science and micro/nanoelectronics. Its properties make it suitable for applications involving surface modification and the creation of advanced materials.
- IUPAC
- Dow Corning® product 1-6321

Surface Modification
Ethyltrimethoxysilane is employed to modify the surface properties of various substrates, enhancing adhesion, hydrophobicity, or reactivity. This is crucial in applications within materials science and microelectronics for tailored surface functionalities.
Chemical Synthesis Intermediate
As an organosilicon compound, it acts as a versatile building block in organic synthesis. It can be used to introduce ethylsilyl groups into molecules or as a precursor for more complex organosilicon structures.
Silane Coupling Agents
This silane can function as a coupling agent, promoting adhesion between organic polymers and inorganic materials. This improves the overall mechanical and chemical properties of composite materials.
Micro/Nanoelectronics Applications
Its use in micro/nanoelectronics involves applications such as forming thin films or modifying surfaces for lithography and device fabrication. It can contribute to the performance and reliability of electronic components.
| Molecular weight | 150.25 |
|---|---|
| Linear formula | C2H5Si(OCH3)3 |
| Assay | ≥97% |
| Form | liquid |
| Boiling point | 123-124 °C(lit.) |
| Density | 0.94 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.384(lit.) |


Hazard statements
- H226Flammable liquid and vapour
- H319Causes serious eye irritation
Precautionary statements
- P305IF IN EYES
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 27 °C / 80.6 °F |
| Transport (UN / ADR) | UN 1993C 3 / PGIII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | Xi |
| Risk statements (R) | 10-36 |
| Safety statements (S) | 16-26-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Ethyltrimethoxysilane used for?
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Ethyltrimethoxysilane (CAS: 5314-55-6) is used in chemical synthesis, materials science, and micro/nanoelectronics for surface modification, as a synthesis intermediate, and as a silane coupling agent.
What are the CAS number and chemical formula for Ethyltrimethoxysilane?
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The CAS number for Ethyltrimethoxysilane is 5314-55-6, and its chemical formula is C2H5Si(OCH3)3.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Ethyltrimethoxysilane with an assay of ≥97%. We do not represent this product as USP, BP, or EP grade.
What are the safety considerations when handling Ethyltrimethoxysilane?
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Ethyltrimethoxysilane is a flammable liquid and an eye irritant. Handle with appropriate personal protective equipment, including eyeshields, gloves, and a suitable respirator, in a well-ventilated area. Store away from ignition sources. It has a flash point of 27°C (80.6°F).
How is Ethyltrimethoxysilane packed, shipped, and exported?
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Ethyltrimethoxysilane is available for packed, shipped, and exported orders through Tech Serve Solutions, adhering to all relevant transportation regulations for flammable liquids.
How can I request a sample or quote for Ethyltrimethoxysilane?
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To request a sample or a quote for Ethyltrimethoxysilane, please contact our sales department through the provided channels on the Tech Serve Solutions website.
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