Hexaethyldigermanium(IV)
Hexaethyldigermanium(IV) (CAS: 993-62-4) is an organogermanium compound with the linear formula (C2H5)3GeGe(C2H5)3 and a molecular weight of 319.65 g/mol. This chemical is primarily utilised as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) processes for thin-film applications. It serves as a valuable reagent in materials science and micro/nanoelectronics research and development.

CVD and ALD Precursor
Hexaethyldigermanium(IV) is employed as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for the formation of germanium-containing thin films. These films are critical in the fabrication of advanced semiconductor devices and optoelectronic components.
Materials Science
In materials science, this organogermanium compound can be used to synthesise novel germanium-based materials with tailored electronic or optical properties. Its unique structure allows for controlled incorporation of germanium into various material matrices.
Chemical Synthesis
As an organometallic reagent, Hexaethyldigermanium(IV) can participate in various chemical synthesis pathways. It serves as a source of germanium for creating more complex organogermanium molecules or compounds for research purposes.
Micro/Nanoelectronics
The compound finds application in the microelectronics and nanoelectronics industries, particularly in research related to next-generation semiconductor materials and devices. Its use as a deposition precursor contributes to advancements in miniaturisation and performance.
| Molecular weight | 319.65 |
|---|---|
| Linear formula | (C2H5)3GeGe(C2H5)3 |
| Assay | 97% |
| Boiling point | 219 °C(lit.) |
| Density | 1.142 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.498(lit.) |

Hazard statements
- H302Harmful if swallowed
- H312Harmful in contact with skin
- H332Harmful if inhaled
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 113 °C / 235.4 °F |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | Xn |
| Risk statements (R) | 20/21/22 |
| Safety statements (S) | 36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Hexaethyldigermanium(IV) used for?
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Hexaethyldigermanium(IV) is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for thin-film applications in materials science and micro/nanoelectronics. It also serves as a reagent in chemical synthesis.
What is the CAS number and formula for Hexaethyldigermanium(IV)?
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The CAS number for Hexaethyldigermanium(IV) is 993-62-4, and its linear formula is (C2H5)3GeGe(C2H5)3.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Hexaethyldigermanium(IV) with an assay of 97%. TSS does not represent this product as USP, BP, EP, or any other pharmacopoeia grade.
How should Hexaethyldigermanium(IV) be handled safely?
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Hexaethyldigermanium(IV) is classified as harmful if swallowed, in contact with skin, or if inhaled (H302-H312-H332). Appropriate personal protective equipment, including eyeshields, gloves, and a suitable respirator, must be used. Always consult the Safety Data Sheet (SDS) for comprehensive handling information.
Is Hexaethyldigermanium(IV) a controlled substance?
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The provided data does not indicate that Hexaethyldigermanium(IV) is a controlled substance.
How is Hexaethyldigermanium(IV) shipped and exported?
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Tech Serve Solutions is a specialist global supplier and exporter of fine chemicals. Hexaethyldigermanium(IV) can be packed and exported according to international shipping regulations for hazardous materials.
How can I request a quote or sample for Hexaethyldigermanium(IV)?
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To request a quote or a sample of Hexaethyldigermanium(IV), please contact our sales team through the TSS website or by phone. Our team will be pleased to assist you.
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