Trimethylboron
Trimethylboron (CAS: 593-90-8, Formula: B(CH3)3) is an organoboron compound with a molecular weight of 55.91 g/mol. This highly reactive gas is primarily utilised as a precursor in chemical vapor deposition (CVD) processes for the formation of boron carbide thin films. Its electronic grade purity makes it suitable for advanced materials science and microelectronics applications.

Chemical Vapor Deposition (CVD) Precursor
Trimethylboron serves as a key precursor for depositing boron carbide (B4C) thin films. This application is critical in materials science for creating wear-resistant coatings and in microelectronics for fabricating specialised semiconductor layers.
Materials Science
Its ability to facilitate the deposition of boron-containing materials makes Trimethylboron valuable in research and development for novel material synthesis and surface modification. It contributes to the creation of advanced composite materials.
Microelectronics Fabrication
Used in the microelectronics industry, Trimethylboron's controlled decomposition allows for precise deposition of thin films essential for semiconductor device manufacturing. It is classified under specialty gases for micro/nanoelectronics.
| Molecular weight | 55.91 |
|---|---|
| Linear formula | B(CH3)3 |
| Assay | ≥98.35% |
| Grade | electronic grade |
| Form | gas |
| Boiling point | −20.2 °C(lit.) |
| Impurities tested | <50 ppm Hydrogen (H2) |
| Melting point | −161.5 °C(lit.) |
| Application | Precursor to boron carbide thin films by chemical vapor deposition (CVD).1 |


Hazard statements
- H280Contains gas under pressure; may explode if heated
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
- P410Protect from sunlight
| Protective equipment | Faceshields, Gloves, Goggles, half-mask respirator (EU), half-mask respirator (US), multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 3160PIHB 2.1(2.3) |
| Water hazard class (WGK, DE) | 1 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 17-34 |
| Safety statements (S) | 7-23-26-36/37/39-43-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Trimethylboron used for?
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Trimethylboron is primarily used as a precursor in chemical vapor deposition (CVD) for the formation of boron carbide thin films, with applications in materials science and microelectronics.
What is the CAS number and chemical formula for Trimethylboron?
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The CAS number for Trimethylboron is 593-90-8, and its chemical formula is B(CH3)3.
What grade and purity does Tech Serve Solutions supply for Trimethylboron?
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Tech Serve Solutions supplies Trimethylboron in electronic grade with an assay of ≥98.35%.
How is Trimethylboron handled and what are the associated hazards?
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Trimethylboron is a gas that presents significant hazards. It is labelled with GHS04 and GHS05 symbols, a Danger signal word, and carries hazard statements H280 (Contains gas under pressure; may explode if heated) and H314 (Causes severe skin burns and eye damage). Handling requires appropriate personal protective equipment, including faceshields, gloves, goggles, and respirators, and should be performed in well-ventilated areas away from heat sources. Refer to the Safety Data Sheet for comprehensive handling instructions.
How is Trimethylboron packed, shipped, and exported by TSS?
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Trimethylboron is supplied as a gas under pressure. As a specialist global supplier, Tech Serve Solutions ensures proper packaging and compliance with all regulations for the safe international shipment and export of hazardous materials.
How can I request a quote or sample of Trimethylboron?
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To request a quote or sample of Trimethylboron, please contact the Tech Serve Solutions sales department through our website or by phone. Our team will be pleased to assist with your specific requirements.
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