Trimethylboron-d9
Trimethylboron-d9 (CAS: 6063-55-4), with the chemical formula B(CD3)3 and a molecular weight of 64.97 g/mol, is a deuterated organoboron compound. This electronic grade material is primarily utilised as a precursor in chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes. Its application in thin film deposition can enhance device performance in microelectronic applications.
CVD and ALD Precursor
Trimethylboron-d9 serves as a specialised precursor for Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) techniques. It enables the deposition of boron-carbon films crucial for advanced microelectronic device fabrication.
Materials Science
In materials science, this deuterated compound is employed for the synthesis of novel boron-containing materials. The controlled deposition allows for precise tuning of material properties for various high-tech applications.
Micro/Nanoelectronics
Its use in the microelectronics and nanoelectronics industries is vital for creating thin films that improve device performance. The deuterated nature may offer specific advantages in certain deposition processes.
Specialty Gases
As a specialty gas, Trimethylboron-d9 is supplied for applications requiring high-purity boron sources. Its controlled vapour pressure makes it suitable for gas-phase deposition processes.
| Molecular weight | 64.97 |
|---|---|
| Linear formula | B(CD3)3 |
| Assay | 99.4% (CP) |
| Grade | electronic grade |
| Boiling point | −20.2 °C(lit.) |
| Vapour density | 2.3 (vs air) |
| Application | The deposition of trimethylboron-d9 derived boron-carbon films can result in increased device performance. |
| Melting point | −161.5 °C(lit.) |
| Transport (UN / ADR) | UN 3160 2.3 |
|---|---|
| Water hazard class (WGK, DE) | 1 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 17-34 |
| Safety statements (S) | 7-23-26-36/37/39-43.11-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Isotopic Purity | 99 atom % D |
|---|---|
| Mass Shift | M+9 |
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Trimethylboron-d9 used for?
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Trimethylboron-d9 is used as a precursor in CVD and ALD processes for depositing boron-carbon films, particularly in microelectronics, to enhance device performance.
What is the CAS number and chemical formula for Trimethylboron-d9?
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The CAS number is 6063-55-4 and the chemical formula is B(CD3)3.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Trimethylboron-d9 at an electronic grade with an assay of 99.4% (CP) and 99 atom % D isotopic purity. We do not represent this product as USP, BP, or EP grade.
How is Trimethylboron-d9 handled and stored?
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Trimethylboron-d9 is highly flammable and corrosive. It must be handled with extreme care in well-ventilated areas, using appropriate personal protective equipment (PPE), and stored away from ignition sources and incompatible materials. Refer to the Safety Data Sheet for detailed handling instructions.
Can Tech Serve Solutions export Trimethylboron-d9?
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Yes, Tech Serve Solutions is a specialist global supplier and exporter of fine chemicals, including Trimethylboron-d9, adhering to all necessary regulations for international shipment.
How can I request a quote or sample of Trimethylboron-d9?
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To request a quote or sample, please visit the Tech Serve Solutions website or contact our sales department directly, providing the product name and CAS number (6063-55-4).
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