Disilane
Disilane (CAS: 1590-87-0, Formula: Si2H6, Molar Mass: 62.22) is a highly reactive inorganic compound supplied by Tech Serve Solutions as an electronic grade gas. It serves as a crucial precursor in advanced materials science and microelectronics, facilitating the low-temperature deposition of epitaxial silicon and silicon-based dielectrics via Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) techniques. Disilane is a key component in the synthesis of specialised materials.
CVD and ALD Precursor
Utilised as a precursor gas for the rapid, low-temperature deposition of epitaxial silicon and silicon-based dielectrics. This application is critical in the fabrication of semiconductor devices and advanced electronic components.
Materials Science
A key material in the development and synthesis of novel silicon-based materials. Its reactivity allows for the creation of thin films and specialised structures with unique electronic and physical properties.
Micro/Nanoelectronics
Essential in microelectronic manufacturing processes, enabling precise thin-film deposition for integrated circuits and microelectromechanical systems (MEMS). It supports the production of high-performance semiconductor devices.
Chemical Synthesis
Employed as a reactive agent in the synthesis of various silicon-containing compounds and materials. Its unique chemical structure facilitates diverse synthetic pathways.
| Molecular weight | 62.22 |
|---|---|
| Linear formula | Si2H6 |
| Grade | electronic grade |
| Form | gas |
| Boiling point | −14.5 °C(lit.) |
| Impurities tested | ≤50 ppm Higher silanes<5 ppm Siloxanes |
| Application | Precursor for the rapid, low temperature deposition of epitaxial silicon and silicon-based dielectrics.1 |
| Melting point | −132.6 °C(lit.) |
Hazard statements
- H220Extremely flammable gas
- H280Contains gas under pressure; may explode if heated
- H312Harmful in contact with skin
- H315Causes skin irritation
- H319Causes serious eye irritation
- H332Harmful if inhaled
- H334May cause allergy or asthma symptoms if inhaled
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P261Avoid breathing dust, fume, gas or vapours
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P342
- P410Protect from sunlight
| Protective equipment | Eyeshields, Faceshields, Gloves, half-mask respirator (EU), half-mask respirator (US), multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 3161 2.1 |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xn |
| Risk statements (R) | 17-20/21-36/37/38-42 |
| Safety statements (S) | 16-24-26-36/37/39 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Transition Temp | critical temperature 150.9 °C |
|---|
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Disilane used for?
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Disilane is primarily used as a precursor for the low-temperature deposition of epitaxial silicon and silicon-based dielectrics in microelectronics and materials science applications via CVD and ALD.
What is the CAS number and chemical formula for Disilane?
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The CAS number for Disilane is 1590-87-0, and its chemical formula is Si2H6.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Disilane in electronic grade. Specific impurity levels are detailed in the product specifications, and it is not represented as USP, BP, or EP grade.
How is Disilane handled and what are the safety considerations?
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Disilane is an extremely flammable gas and can cause respiratory irritation and serious eye irritation. It is harmful if inhaled or absorbed through the skin. Appropriate personal protective equipment, including eyeshields, gloves, and respiratory protection, must be used. Handle only in well-ventilated areas. Refer to the Safety Data Sheet for comprehensive guidance.
How is Disilane packed, shipped, and exported?
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Disilane is supplied as a gas. It is shipped and exported in compliance with all relevant regulations for hazardous materials, including UN 3161 classification.
How can I request a sample or quote for Disilane?
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To request a sample or quote for Disilane, please contact our sales team through the website or by calling our customer service line, providing your specific requirements.
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