Diborane-d6
Diborane-d6 (CAS: 20396-66-1, Formula: B2D6) is a deuterated form of diborane, a highly reactive and pyrophoric gas. With a molecular weight of 33.71 g/mol, it serves as a critical p-type dopant in the semiconductor industry for the deposition of silicon thin films via Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD). Its isotopic substitution offers unique properties for advanced electronic applications.
Semiconductor Doping
Diborane-d6 is extensively used as a p-type dopant in the manufacturing of semiconductor devices. It is employed in the deposition of epitaxial and amorphous silicon thin films, contributing to enhanced device performance and reliability.
Materials Science
This deuterated gas finds application in materials science research, particularly in studies involving isotopic effects in material properties or in the controlled synthesis of novel silicon-based materials.
Chemical Synthesis
As a source of boron and deuterium, diborane-d6 can be utilised in specialised chemical synthesis routes where isotopic labelling or specific boron functionalities are required.
Advanced Vapor Deposition
It functions as a precursor in advanced vapor deposition techniques such as CVD and ALD, enabling precise control over the incorporation of dopants in microelectronic fabrication.
| Molecular weight | 33.71 |
|---|---|
| Linear formula | B2D6 |
| Assay | 9-11% (balance is helium) |
| Grade | electronic grade |
| Boiling point | −92.5 °C(lit.) |
| Concentration | 10% in helium |
| Application | Diborane gas is used primarily as a p-type dopant in the deposition of epitaxial and amorphous silicon thin films. The unique properties of diborane-d6 can result in increased device performance and reliability. |
Hazard statements
- H220Extremely flammable gas
- H280Contains gas under pressure; may explode if heated
- H301Toxic if swallowed
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P261Avoid breathing dust, fume, gas or vapours
- P280Wear protective gloves, clothing and eye/face protection
- P301IF SWALLOWED
- P305IF IN EYES
- P311Call a POISON CENTER or doctor
| Transport (UN / ADR) | UN 1953PIHA 2.3(2.1) |
|---|---|
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | T |
| Risk statements (R) | 23/24/25-36/37/38 |
| Safety statements (S) | 9-16-36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Mass Shift | M+6 |
|---|
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Diborane-d6 used for?
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Diborane-d6 is primarily used as a p-type dopant in the deposition of silicon thin films for semiconductor manufacturing, as well as in materials science and specialised chemical synthesis.
What is the CAS number and formula for Diborane-d6?
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The CAS number for Diborane-d6 is 20396-66-1 and its chemical formula is B2D6.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Diborane-d6 in electronic grade, with an assay of 9-11% in helium. We do not represent this product as USP, BP, or EP grade.
How is Diborane-d6 supplied and handled?
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Diborane-d6 is supplied as a 10% concentration in helium, as it is a highly flammable gas (GHS02) and toxic (GHS06). It requires careful handling due to its pyrophoric nature and associated health hazards (Danger: H220-H280-H301 + H311 + H331-H315-H319-H335).
How can I request a quote or sample for Diborane-d6?
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To request a quote or sample for Diborane-d6, please contact our sales department through the TSS website or by phone.
Is Diborane-d6 a controlled substance?
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The provided data does not indicate that Diborane-d6 is a controlled substance under standard chemical regulations.
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