Chlorotriethoxysilane
Chlorotriethoxysilane (CAS: 4667-99-6) is an organosilicon compound with the linear formula (C2H5O)3SiCl and a molecular weight of 198.72 g/mol. This colourless liquid is primarily employed as a versatile building block in chemical synthesis. Its reactive nature makes it valuable for introducing triethoxysilyl groups, serving as a protecting agent, and in the preparation of various silicon-containing materials.
- IUPAC
- Triethoxychlorosilane
- Synonyms
- Triethoxychlorosilane

Chemical Synthesis
Utilised as a reagent in organic synthesis for the introduction of triethoxysilyl functionalities onto various substrates. It serves as a precursor for more complex organosilicon compounds.
Protecting Group Chemistry
Acts as a protecting agent for functional groups during multi-step synthesis, leveraging the hydrolytic sensitivity of the ethoxy groups. It allows for selective deprotection under controlled conditions.
Surface Modification
Can be used for modifying surfaces by forming siloxane bonds, altering properties such as hydrophobicity or adhesion. This is relevant in the development of coatings and composite materials.
Precursor for Silicon-Based Materials
Serves as a starting material in the sol-gel process or other polymerisation techniques to produce silica-based materials and resins with tailored properties.
| Molecular weight | 198.72 |
|---|---|
| Linear formula | (C2H5O)3SiCl |
| Assay | 98% |
| Boiling point | 156-157 °C(lit.) |
| Density | 1.012 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.3900(lit.) |
| Storage temperature | 2-8°C |


Hazard statements
- H226Flammable liquid and vapour
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 47 °C / 116.6 °F |
| Transport (UN / ADR) | UN 2986 3(8) / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 10-34 |
| Safety statements (S) | 16-26-27-36/37/39 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Chlorotriethoxysilane used for?
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Chlorotriethoxysilane is used in chemical synthesis, as a protecting agent, for surface modification, and as a precursor for silicon-based materials.
What is the CAS number and formula for Chlorotriethoxysilane?
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The CAS number is 4667-99-6 and the linear formula is (C2H5O)3SiCl.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Chlorotriethoxysilane with an assay of 98%. This is a technical grade and not represented as USP, BP, EP, or pharmacopoeia grade.
How should Chlorotriethoxysilane be handled safely?
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Chlorotriethoxysilane is a flammable liquid and causes severe skin burns and eye damage (H226, H314). Handle with extreme care using appropriate personal protective equipment, including gloves, eye protection, and respiratory protection in a well-ventilated area. Store at 2-8°C.
How is Chlorotriethoxysilane packed and shipped?
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This product is shipped as UN 2986, Hazard Class 3 (8), Packing Group II, adhering to all relevant transportation regulations for hazardous materials.
How can I request a quote or sample for Chlorotriethoxysilane?
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Please contact our sales team through the website or by phone to request a quote or a sample of Chlorotriethoxysilane.
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