Tris(tert-butoxy)silanol
Tris(tert-butoxy)silanol (CAS: 18166-43-3) is an organosilicon compound with the linear formula ((CH3)3CO)3SiOH. This white solid, with a molecular weight of 264.43 g/mol, is primarily used as a precursor in materials science and micro/nanoelectronics. Its high purity makes it suitable for advanced chemical synthesis and vapor deposition techniques, including Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD).
- IUPAC
- TBS

CVD and ALD Precursor
Tris(tert-butoxy)silanol serves as a crucial precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) processes. It is particularly valuable for depositing thin films in microelectronics and semiconductor manufacturing.
Materials Science
This compound finds application in materials science research and development for the synthesis of novel silicon-containing materials. Its unique structure allows for controlled incorporation of silicon into various material architectures.
Chemical Synthesis
As an organosilicon reagent, Tris(tert-butoxy)silanol is employed in specialized chemical synthesis. It can be utilized in reactions where a protected or sterically hindered silanol group is required.
Micro/Nanoelectronics
Its high purity and specific properties make it a suitable material for advanced applications in micro- and nanoelectronics, contributing to the fabrication of integrated circuits and electronic devices.
| Molecular weight | 264.43 |
|---|---|
| Linear formula | ((CH3)3CO)3SiOH |
| Assay | 99.999% |
| Form | solid |
| Boiling point | 205-210 °C(lit.) |
| Melting point | 63-65 °C(lit.) |
| Protective equipment | Eyeshields, Gloves, type N95 (US), type P1 (EN143) respirator filter |
|---|---|
| Water hazard class (WGK, DE) | 3 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tris(tert-butoxy)silanol used for?
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Tris(tert-butoxy)silanol is primarily used as a precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD), in materials science, chemical synthesis, and micro/nanoelectronics applications.
What is the CAS number and formula for Tris(tert-butoxy)silanol?
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The CAS number for Tris(tert-butoxy)silanol is 18166-43-3, and its linear formula is ((CH3)3CO)3SiOH.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tris(tert-butoxy)silanol with an assay of 99.999%. TSS does not represent this product as USP, BP, EP, or any other pharmacopoeia grade.
What are the safety and handling considerations for Tris(tert-butoxy)silanol?
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Handling Tris(tert-butoxy)silanol requires appropriate personal protective equipment, including eyeshields and gloves. A type N95 (US) or type P1 (EN143) respirator filter should be used. It is classified with WGK Germany 3.
Is Tris(tert-butoxy)silanol a controlled substance?
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The provided data does not indicate that Tris(tert-butoxy)silanol is a controlled substance.
How is Tris(tert-butoxy)silanol packaged, shipped, and exported?
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Tris(tert-butoxy)silanol is supplied as a solid and is packaged, shipped, and exported according to industry standards for fine chemicals and laboratory reagents by Tech Serve Solutions.
How can I request a sample or quote for Tris(tert-butoxy)silanol?
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To request a sample or a quote for Tris(tert-butoxy)silanol, please contact the Tech Serve Solutions sales department through our website or by phone.
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