Tris(tert-pentoxy)silanol
Tris(tert-pentoxy)silanol (CAS: 17906-35-3) is an organosilicon compound with the molecular formula (CH3CH2C(CH3)2O)3SiOH and a molecular weight of 306.51 g/mol. This liquid silanol finds primary application as a precursor in chemical synthesis and materials science. It is particularly noted for its use in microelectronics for vapor deposition processes, including Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD), contributing to the creation of advanced semiconductor materials.
- IUPAC
- TPS

Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD)
Tris(tert-pentoxy)silanol serves as a valuable precursor for CVD and ALD processes. Its controlled decomposition allows for the deposition of high-quality silicon-containing thin films crucial in semiconductor manufacturing and microelectronics.
Materials Science Research
In materials science, this silanol is utilised for synthesising novel organosilicon materials and functionalised surfaces. It enables the development of advanced materials with tailored properties for various technological applications.
Organosilicon Synthesis
As an organosilicon reagent, it is employed in complex chemical synthesis pathways. Its structure allows for diverse reactions, contributing to the broader field of organosilicon chemistry and the creation of specialized compounds.
| Molecular weight | 306.51 |
|---|---|
| Linear formula | (CH3CH2C(CH3)2O)3SiOH |
| Form | liquid |
| Boiling point | 96-99 °C/2-3 mmHg(lit.) |
| Density | 0.944 g/mL at 25 °C(lit.) |
Hazard statements
- H413May cause long-lasting harmful effects to aquatic life
| Protective equipment | Eyeshields, Gloves |
|---|---|
| Flash point | 106 °C / 222.8 °F |
| Water hazard class (WGK, DE) | 3 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tris(tert-pentoxy)silanol used for?
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Tris(tert-pentoxy)silanol is primarily used as a precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) for microelectronics and materials science, as well as in organosilicon synthesis.
What is the CAS number and formula for Tris(tert-pentoxy)silanol?
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The CAS number for Tris(tert-pentoxy)silanol is 17906-35-3, and its linear formula is (CH3CH2C(CH3)2O)3SiOH.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tris(tert-pentoxy)silanol in a technical/research grade. We do not represent this product as USP, BP, EP, or any other pharmacopoeia grade.
What are the safety and handling considerations for Tris(tert-pentoxy)silanol?
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Tris(tert-pentoxy)silanol carries the hazard statement H413, indicating it may cause long-lasting harmful effects to aquatic life. Personal protective equipment, including eyeshields and gloves, is recommended. Handle in accordance with good laboratory practices. Refer to the Safety Data Sheet for detailed information.
Is Tris(tert-pentoxy)silanol available for export?
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Yes, Tech Serve Solutions is a global supplier and exporter of fine chemicals, including Tris(tert-pentoxy)silanol, packaged for deposition systems.
How can I request a quote or sample for Tris(tert-pentoxy)silanol?
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To request a quote or sample, please contact our sales department through the website or by phone, providing your specific requirements and shipping details.
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