Triethoxymethylsilane
Triethoxymethylsilane (CAS: 2031-67-6; Formula: CH3Si(OC2H5)3) is an organosilicon compound with a molecular weight of 178.30 g/mol. This clear liquid serves as a valuable intermediate in chemical synthesis and materials science. Its applications span the development of nanomaterials, micro/nanoelectronics, and its use as a precursor for silsesquioxanes and POSS nanohybrids.
- IUPAC
- Methyltriethoxysilane

Chemical Synthesis
Triethoxymethylsilane is utilized as a versatile building block in organic and organometallic synthesis. It acts as a precursor for various organosilicon compounds and functional materials.
Materials Science and Nanomaterials
It serves as a key component in the synthesis of silsesquioxanes and polyhedral oligomeric silsesquioxanes (POSS) nanohybrids. These materials find applications in advanced coatings, composites, and electronic devices.
Micro/Nanoelectronics
The compound is employed in the fabrication of electronic components and thin films. Its properties are beneficial for creating dielectric layers and surface modification in microelectronic devices.
Silane Coupling Agents
Triethoxymethylsilane can function as a precursor or component in the development of silane coupling agents. These agents promote adhesion between organic polymers and inorganic substrates.
| Molecular weight | 178.30 |
|---|---|
| Linear formula | CH3Si(OC2H5)3 |
| Assay | 90% |
| Grade | technical grade |
| Boiling point | 141-143 °C(lit.) |
| Density | 0.895 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.383(lit.) |
| Vapour pressure | 11 mmHg (20 °C) |
| Vapour density | >1 (vs air) |

Hazard statements
- H226Flammable liquid and vapour
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 23 °C / 73.4 °F |
| Transport (UN / ADR) | UN 1993C 3 / PGIII |
| Water hazard class (WGK, DE) | 3 |
| Risk statements (R) | 10 |
| Safety statements (S) | 16 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Triethoxymethylsilane used for?
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Triethoxymethylsilane is primarily used in chemical synthesis, materials science for developing nanomaterials like silsesquioxanes and POSS nanohybrids, and in the micro/nanoelectronics industry for fabricating components and thin films.
What is the CAS number and formula for Triethoxymethylsilane?
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The CAS number is 2031-67-6, and the chemical formula is CH3Si(OC2H5)3.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Triethoxymethylsilane in technical grade with an assay of 90%. We do not represent this product as USP, BP, or EP grade.
How should Triethoxymethylsilane be handled safely?
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Triethoxymethylsilane is a flammable liquid (H226) requiring careful handling. Use in a well-ventilated area, away from ignition sources. Appropriate personal protective equipment, including eyeshields, gloves, and suitable respiratory protection (e.g., type ABEK respirator filter), is essential.
Is Triethoxymethylsilane flammable?
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Yes, Triethoxymethylsilane is a flammable liquid with a flash point of 23 °C (73.4 °F) and carries the hazard statement H226.
How is Triethoxymethylsilane packed, shipped, and exported?
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As a specialist global supplier, Tech Serve Solutions exports chemicals internationally, adhering to all relevant shipping and handling regulations for flammable liquids like Triethoxymethylsilane (UN 1993, Class 3, Packing Group III).
How can I request a quote or sample for Triethoxymethylsilane?
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To request a quote or a sample of Triethoxymethylsilane, please contact our sales team through the website or by calling us directly.
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