Phosphine
Phosphine (CAS: 7803-51-2, Formula: PH3, MW: 34.00) is an extremely toxic, pyrophoric, and flammable gas. It is primarily used in the semiconductor industry for manufacturing III-V materials via OMCVD and as a dopant in silicon-based electronics. Tech Serve Solutions supplies high-purity phosphine for critical industrial applications, ensuring reliability and precision for advanced material synthesis and electronic component production.

Semiconductor Manufacturing
Phosphine is a critical precursor in the production of III-V semiconductor materials using techniques like Organometallic Chemical Vapor Deposition (OMCVD). It is also employed as a dopant to precisely control the electrical properties of crystalline and amorphous silicon in electronic device fabrication.
Dopant Gas
Utilised as a dopant gas, phosphine allows for the controlled introduction of phosphorus atoms into silicon substrates. This is essential for creating n-type semiconductor materials crucial for transistors, diodes, and integrated circuits.
Chemical Synthesis
In inorganic chemistry and chemical synthesis, phosphine serves as a reagent and a source of phosphorus for creating various organophosphorus compounds and coordination complexes.
| Molecular weight | 34.00 |
|---|---|
| Linear formula | PH3 |
| Assay | ≥99.9995% |
| Grade | electronic grade |
| Form | gas |
| Boiling point | −87.5 °C(lit.) |
| Vapour density | 1.15 (vs air) |
| Impurities tested | <1 ppm Water (H2O) |
| Application | Phosphine is used primarily in the manufacture of III-IV semiconductor materials by OMCVD and as a dopant in crystalline and amorphous silicon. |




Hazard statements
- H220Extremely flammable gas
- H280Contains gas under pressure; may explode if heated
- H314Causes severe skin burns and eye damage
- H330Fatal if inhaled
- H400Very toxic to aquatic life
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P260Do not breathe dust, fume, gas, mist, vapours or spray
- P273Avoid release to the environment
- P280Wear protective gloves, clothing and eye/face protection
- P284Wear respiratory protection
- P305IF IN EYES
| Protective equipment | Faceshields, Gloves, Goggles, half-mask respirator (EU), half-mask respirator (US), multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 2199 2.1(2.3) |
| Water hazard class (WGK, DE) | 2 |
| Hazard codes (EU) | F+,T+,N |
| Risk statements (R) | 12-17-26-34-50 |
| Safety statements (S) | 28-36/37-45-61-63 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Transition Temp | critical temperature 51.3 °C |
|---|
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Phosphine (CAS: 7803-51-2) used for?
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Phosphine (PH3) is primarily used in the semiconductor industry for manufacturing III-V materials via OMCVD and as a dopant in crystalline and amorphous silicon. It also finds applications in chemical synthesis.
What are the CAS number and formula for Phosphine?
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The CAS number for Phosphine is 7803-51-2, and its chemical formula is PH3.
What grade and purity does Tech Serve Solutions supply for Phosphine?
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Tech Serve Solutions supplies Phosphine in electronic grade with an assay of ≥99.9995%. TSS does not represent this product as USP, BP, or EP grade.
How is Phosphine safely handled and transported?
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Phosphine is an extremely flammable, toxic gas (H220, H330) that is also corrosive (H314) and very toxic to aquatic life (H400). It requires stringent safety protocols, including specialised handling equipment, ventilation, and personal protective equipment (PPE) such as full-face respirators and protective suits. It is transported under UN 2199, Hazard Class 2.1 (2.3), requiring adherence to strict regulations.
Is Phosphine a controlled substance?
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The provided data does not indicate that Phosphine (CAS: 7803-51-2) is a controlled substance in a manner requiring specific scheduling information.
How can I request a quote or sample of Phosphine?
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To request a quote or sample of Phosphine, please contact the Tech Serve Solutions sales team through our website or by phone. Our experts will assist you with your specific requirements.
Does TSS export Phosphine globally?
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Yes, Tech Serve Solutions is a specialist global supplier and exporter of fine chemicals, including Phosphine, serving customers worldwide.
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