Pentakis(dimethylamino)tantalum(V)
Pentakis(dimethylamino)tantalum(V), identified by CAS number 19824-59-0 and with the molecular formula Ta(N(CH3)2)5, is a tantalum compound with a molecular weight of 401.33. Supplied as a solid with a purity of 99.99%, this compound is primarily utilised as a precursor in chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes. Its chemical properties make it valuable in materials science and micro/nanoelectronics applications.
- IUPAC
- PDMAT,TADMA,Ta(NMe2)5,Tantalum dimethylamide
- Synonyms
- PDMATTADMATa(NMe2)5Tantalum dimethylamide

CVD and ALD Precursor
Pentakis(dimethylamino)tantalum(V) serves as a key precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) techniques. It is used to deposit thin films of tantalum-containing materials for electronic and semiconductor applications.
Materials Science
This organometallic compound finds application in materials science for the synthesis of novel tantalum-based materials. Its controlled decomposition allows for the formation of specific structures and properties at the nanoscale.
Micro/Nanoelectronics
In the microelectronics industry, Pentakis(dimethylamino)tantalum(V) is employed in the fabrication of advanced electronic devices. It facilitates the deposition of high-quality dielectric or conductive layers crucial for miniaturisation.
Chemical Synthesis
As a reactive tantalum source, it can be utilised in specialised inorganic chemistry and chemical synthesis. Its unique ligand set offers opportunities for developing new catalytic systems or metal-organic frameworks.
| Molecular weight | 401.33 |
|---|---|
| Linear formula | Ta(N(CH3)2)5 |
| Assay | 99.99% |
| Form | solid |
| Melting point | 100 °C (dec.)(lit.) |


Hazard statements
- H260In contact with water releases flammable gases
- H314Causes severe skin burns and eye damage
Precautionary statements
- P223Do not allow contact with water
- P231Handle under inert gas
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P370In case of fire
- P422
| Protective equipment | Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges |
|---|---|
| Transport (UN / ADR) | UN 3131 8(4.3) / PGI |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 11-14/15-34 |
| Safety statements (S) | 16-26-36/37/39-43-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Pentakis(dimethylamino)tantalum(V) used for?
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Pentakis(dimethylamino)tantalum(V) is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) processes for the fabrication of thin films in materials science and micro/nanoelectronics.
What are the CAS number and formula for Pentakis(dimethylamino)tantalum(V)?
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The CAS number for Pentakis(dimethylamino)tantalum(V) is 19824-59-0, and its molecular formula is Ta(N(CH3)2)5.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Pentakis(dimethylamino)tantalum(V) at a purity of 99.99%. This is a research or technical grade material; TSS does not represent it as USP, BP, or EP grade.
How should Pentakis(dimethylamino)tantalum(V) be handled safely?
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Pentakis(dimethylamino)tantalum(V) is a Danger hazard, classified as H260 and H314. It reacts violently with water (supplemental hazard statement). Appropriate personal protective equipment, including eyeshields, faceshields, gloves, and suitable respiratory protection, must be used. Handle under inert conditions, away from moisture. Refer to the Safety Data Sheet for comprehensive handling instructions.
How is Pentakis(dimethylamino)tantalum(V) packed, shipped, and exported?
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As per UN 3131, this material is packed and shipped as a dangerous good, classified under Class 8 (4.3) with Packing Group I. Tech Serve Solutions adheres to all international regulations for the safe packing, shipping, and export of hazardous chemicals.
How can I request a sample or quote for Pentakis(dimethylamino)tantalum(V)?
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To request a sample or a quotation for Pentakis(dimethylamino)tantalum(V), please contact our sales department via the 'Request a Quote' or 'Contact Us' forms on our website.
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