Hexamethyldisilazane
Hexamethyldisilazane (HMDS), CAS 999-97-3, with the linear formula (CH₃)₃SiNHSi(CH₃)₃ and a molecular weight of 161.39 g/mol, is a versatile organosilicon compound. It serves as a key reagent in organic synthesis, particularly for silylation reactions, and finds application in the production of electronic chemicals and materials science, including surface modification and micro/nanoelectronics.
- IUPAC
- HMDS
- Synonyms
- HMDSBis(trimethylsilyl)amine1,1,1,3,3,3-Hexamethyldisilazane(Trimethylsilyl)amine, N,N-bis(trimethylsilyl)N,N-Bis(trimethylsilyl)amine
Organic Synthesis Reagent
HMDS is widely used as a silylating agent to protect hydroxyl, amine, and carboxyl groups. It facilitates the introduction of trimethylsilyl (TMS) groups, rendering compounds more volatile and stable for analytical techniques like gas chromatography.
Semiconductor Manufacturing
In the microelectronics industry, HMDS is employed as an adhesion promoter for photoresists on silicon wafers. It improves the bonding of the photoresist layer to the wafer surface, crucial for high-resolution lithography processes.
Materials Science and Surface Modification
HMDS is utilized for modifying the surface properties of various materials, including glass and silica. This treatment can impart hydrophobicity and alter surface energy, which is beneficial in chromatography and nanotechnology.
Precursor for Silicon Nitride
This compound can act as a precursor in the synthesis of silicon nitride materials, contributing to the development of advanced ceramics and coatings with desirable thermal and mechanical properties.
| Molecular weight | 161.39 |
|---|---|
| Linear formula | (CH3)3SiNHSi(CH3)3 |
| Assay | ≥99% |
| Grade | semiconductor grade PURANAL™ (Honeywell 17713) |
| Boiling point | 125 °C(lit.) |
| Refractive index | n20/D 1.407(lit.) |
Hazard statements
- H225Highly flammable liquid and vapour
- H302Harmful if swallowed
- H311Toxic in contact with skin
- H314Causes severe skin burns and eye damage
- H412Harmful to aquatic life with long-lasting effects
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P273Avoid release to the environment
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 11 °C / 51.8 °F |
| Transport (UN / ADR) | UN 3286 3/PG 2 |
| Water hazard class (WGK, DE) | 2 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 11-20/21/22-34-52/53 |
| Safety statements (S) | 16-26-36/37/39-45-61 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Cofa | specification on request |
|---|
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Hexamethyldisilazane used for?
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Hexamethyldisilazane (HMDS) is primarily used as a silylating agent in organic synthesis, an adhesion promoter in semiconductor manufacturing, and for surface modification in materials science.
What is the CAS number and formula for Hexamethyldisilazane?
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The CAS number for Hexamethyldisilazane is 999-97-3, and its linear formula is (CH₃)₃SiNHSi(CH₃)₃.
What grade and purity does Tech Serve Solutions supply for Hexamethyldisilazane?
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Tech Serve Solutions supplies Hexamethyldisilazane with an assay of ≥99% and a semiconductor grade, PURANAL™ (Honeywell 17713). We do not represent this product as USP, BP, or EP grade.
How should Hexamethyldisilazane be handled safely?
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Hexamethyldisilazane is a highly flammable liquid and vapor (H225), harmful if swallowed or inhaled (H302 + H332), causes severe skin burns and eye damage (H314), and is toxic in contact with skin (H311). It is also harmful to aquatic life with long-lasting effects (H412). Handle with appropriate personal protective equipment including gloves, eye protection, and respiratory protection in a well-ventilated area. Refer to the Safety Data Sheet for comprehensive handling information.
How is Hexamethyldisilazane packed, shipped, and exported?
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Hexamethyldisilazane is typically packed in UN-approved containers suitable for flammable and corrosive liquids. TSS can export this chemical globally, adhering to all relevant international shipping and customs regulations for hazardous materials.
How can I request a sample or quote for Hexamethyldisilazane?
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To request a sample or a quote for Hexamethyldisilazane, please contact our sales team through the website or via email, specifying the product CAS number (999-97-3) and the quantity required.
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