Hexamethyldisilane
Hexamethyldisilane (CAS: 1450-14-2) is an organosilicon compound with the linear formula (Si(CH3)3)2 and a molecular weight of 146.38 g/mol. This flammable liquid serves as a crucial silylating reagent in organic synthesis and as a precursor in materials science, particularly for silicon carbide growth via vapor deposition techniques. Its unique chemical properties make it valuable in microelectronics and advanced material fabrication.
- IUPAC
- Disilane M6

Silylating Reagent
Hexamethyldisilane is employed as a silylating agent for various organic substrates, including allylic acetates, aryl halides, and diketones. This process is vital for protecting functional groups or modifying molecular structures in complex syntheses.
Chemical Synthesis
As a disilane compound, it participates in various chemical transformations, contributing to the synthesis of novel organosilicon compounds and materials. Its reactivity makes it a versatile building block in organic and organometallic chemistry.
Vapor Deposition Precursor
The compound functions as a source material in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. It is particularly utilized for the growth of silicon carbide (SiC) thin films, essential for semiconductor applications.
Materials Science
Hexamethyldisilane finds applications in materials science for developing advanced materials, including silicon-based ceramics and coatings. Its use in vapor deposition contributes to fabricating materials with specific electronic and structural properties.
Microelectronics
In the microelectronics industry, it serves as a precursor in deposition processes, aiding in the creation of specialized layers and components for semiconductor devices.
| Molecular weight | 146.38 |
|---|---|
| Linear formula | (Si(CH3)3)2 |
| Assay | ≥98.0% (GC) |
| Form | liquid |
| Boiling point | 112-114 °C(lit.) |
| Density | 0.715 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.422(lit.) |
| Melting point | 9-12 °C(lit.) |
| Application | Silylating reagent for allylic acetates,1 aryl halides,2 and diketones.3 Source material for vapor deposition during silicon carbide growth.4 |



Hazard statements
- H225Highly flammable liquid and vapour
- H319Causes serious eye irritation
- H334May cause allergy or asthma symptoms if inhaled
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
- P342
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 11 °C / 51.8 °F |
| Transport (UN / ADR) | UN 1993BF 3 / PGII |
| Water hazard class (WGK, DE) | 2 |
| Hazard codes (EU) | F,Xi |
| Risk statements (R) | 11-36/37-43 |
| Safety statements (S) | 16-23-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Hexamethyldisilane used for?
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Hexamethyldisilane is primarily used as a silylating reagent in organic synthesis for compounds like allylic acetates and aryl halides, and as a precursor for silicon carbide growth in vapor deposition processes for materials science and microelectronics.
What are the CAS number and chemical formula for Hexamethyldisilane?
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The CAS number for Hexamethyldisilane is 1450-14-2, and its linear chemical formula is (Si(CH3)3)2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Hexamethyldisilane with a purity of ≥98.0% (GC). TSS does not represent this product as USP, BP, or EP grade.
What are the safety and handling considerations for Hexamethyldisilane?
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Hexamethyldisilane is a highly flammable liquid and vapour (H225), causes serious eye irritation (H319), may cause respiratory irritation (H335), and can cause allergy or asthma symptoms or breathing difficulties if inhaled (H334). Handle with appropriate personal protective equipment, including safety goggles, gloves, and a suitable respirator, in a well-ventilated area away from ignition sources.
How is Hexamethyldisilane packed, shipped, and exported?
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Hexamethyldisilane is packed and shipped according to relevant regulations for hazardous materials, including UN 1993 classification. Tech Serve Solutions is experienced in global export.
How can I request a sample or quote for Hexamethyldisilane?
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To request a sample or a quote for Hexamethyldisilane, please contact our sales team through the website or via direct inquiry, providing your contact details and required quantity.
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