Hexamethyldigermanium(IV)
Hexamethyldigermanium(IV), CAS 993-52-2, with the linear formula (CH3)3GeGe(CH3)3 and a molecular weight of 235.49 g/mol, is an organogermanium compound. It serves as a valuable precursor in advanced material deposition techniques. Its primary applications lie in chemical synthesis and the development of micro/nanoelectronic devices, where it facilitates the deposition of germanium-containing thin films.

Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD)
Hexamethyldigermanium(IV) is utilized as a precursor in CVD and ALD processes. It enables the deposition of germanium-based thin films, which are crucial for semiconductor manufacturing and advanced materials.
Materials Science Research
This organogermanium compound finds application in materials science research. It is used for the synthesis of novel germanium-containing materials and for exploring new material properties.
Micro/Nanoelectronics Fabrication
In the field of micro- and nanoelectronics, hexamethyldigermanium(IV) is employed in fabrication processes. It contributes to the creation of advanced electronic components by allowing precise germanium incorporation.
Organogermanium Chemistry
As a difunctional organogermanium compound, it is a building block in organogermanium synthesis. It allows for the introduction of germanium-Ge bonds into various molecular structures.
| Molecular weight | 235.49 |
|---|---|
| Linear formula | (CH3)3GeGe(CH3)3 |
| Grade | technical grade |
| Boiling point | 137-138 °C(lit.) |
| Density | 1.175 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.456(lit.) |
| Melting point | −40 °C(lit.) |


Hazard statements
- H225Highly flammable liquid and vapour
- H302Harmful if swallowed
- H312Harmful in contact with skin
- H332Harmful if inhaled
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P280Wear protective gloves, clothing and eye/face protection
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 14 °C / 57.2 °F |
| Transport (UN / ADR) | UN 1993BF 3 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xn |
| Risk statements (R) | 11-20/21/22 |
| Safety statements (S) | 16-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Hexamethyldigermanium(IV) used for?
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Hexamethyldigermanium(IV) is used as a precursor in chemical vapor deposition (CVD) and atomic layer deposition (ALD) for creating germanium-containing thin films, particularly in micro/nanoelectronics and materials science research.
What is the CAS number and formula for Hexamethyldigermanium(IV)?
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The CAS number for Hexamethyldigermanium(IV) is 993-52-2, and its linear formula is (CH3)3GeGe(CH3)3.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Hexamethyldigermanium(IV) in technical grade. We do not represent it as USP, BP, or EP grade.
How should Hexamethyldigermanium(IV) be handled safely?
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Hexamethyldigermanium(IV) is a highly flammable liquid and vapor (H225) and is harmful if swallowed, in contact with skin, or if inhaled (H302, H312, H332). Handle with appropriate personal protective equipment, including eyeshields, gloves, and a suitable respirator, in a well-ventilated area away from ignition sources.
How is Hexamethyldigermanium(IV) packed and shipped?
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As a specialist global supplier, Tech Serve Solutions ensures appropriate packaging and shipping for Hexamethyldigermanium(IV) in accordance with international regulations for hazardous materials like UN 1993 BF 3 / PG II.
How can I request a quote or sample for Hexamethyldigermanium(IV)?
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To request a quote or sample for Hexamethyldigermanium(IV), please contact the Tech Serve Solutions sales team through our website or by phone.
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