Tris(ethylmethylamido)(tert-butylimido)tantalum(V)
Tris(ethylmethylamido)(tert-butylimido)tantalum(V), CAS 511292-99-2, is an organometallic compound with the formula C13H33N4Ta and a molecular weight of 426.38 g/mol. This electronic grade material is a key precursor in advanced material deposition techniques. It is particularly valuable for the chemical vapour deposition (CVD) and atomic layer deposition (ALD) of tantalum-containing thin films, finding applications in microelectronics and materials science.
Chemical Vapour Deposition (CVD)
Serves as a precursor for the deposition of tantalum-based thin films via CVD processes. These films are critical in the manufacturing of semiconductor devices and integrated circuits.
Atomic Layer Deposition (ALD)
Utilised as a volatile source material in ALD, enabling precise control over the thickness and conformality of tantalum oxide and nitride films for advanced electronic applications.
Materials Science
Employed in research and development for creating novel materials with specific electronic or optical properties, leveraging the incorporation of tantalum into material structures.
Catalysis Research
Investigated for potential applications in homogeneous or heterogeneous catalysis, owing to the unique coordination environment of the tantalum centre.
| Molecular weight | 426.38 |
|---|---|
| Empirical formula | C13H33N4Ta |
| Assay | ≥95% (CP)≥99.99% trace metals basis |
| Grade | electronic grade |
| Density | 1.323 g/mL at 21 °C(lit.) |
Hazard statements
- H226Flammable liquid and vapour
- H261In contact with water releases flammable gas
- H314Causes severe skin burns and eye damage
Precautionary statements
- P231Handle under inert gas
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
- P422
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 17 °C / 62.6 °F |
| Transport (UN / ADR) | UN 3398 4.3/PG 2 |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 10-14/15-34 |
| Safety statements (S) | 26-36/37/39-43-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tris(ethylmethylamido)(tert-butylimido)tantalum(V) used for?
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This compound is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for the fabrication of thin films in microelectronics and materials science.
What are the CAS number and chemical formula?
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The CAS number is 511292-99-2, and the chemical formula is C13H33N4Ta.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies this compound in electronic grade with an assay of ≥95% (CP) and ≥99.99% trace metals basis.
How should Tris(ethylmethylamido)(tert-butylimido)tantalum(V) be handled safely?
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This compound is flammable and reacts violently with water, posing a severe risk of burns. Handle with extreme care in an inert atmosphere, avoiding contact with water and using appropriate personal protective equipment including face shields, gloves, and respirators. Refer to the Safety Data Sheet for comprehensive handling instructions.
How is this chemical packed, shipped, and exported?
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Tech Serve Solutions ensures secure packing and adheres to all international regulations for the safe transport and export of this hazardous chemical, including UN 3398 classification.
How can I request a sample or quote?
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To request a sample or a quotation, please contact our sales team through the website or by phone, providing your specific requirements.
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