Trimethyl phosphite
Trimethyl phosphite (CAS: 121-45-9) is an organophosphorus compound with the formula P(OCH3)3 and a molecular weight of 124.08 g/mol. This colourless liquid is primarily recognised for its utility as a phosphite ligand in catalysis and as a precursor in chemical synthesis. Its high purity makes it suitable for advanced applications, including the deposition of thin films in microelectronics.
- IUPAC
- Methyl phosphite,P(OMe)3,Trimethoxyphosphine
- Synonyms
- Trimethyl phosphiteTrimethoxyphosphineMethyl phosphiteP(OMe)3Trimethoxophosphine

Catalysis
As a phosphite ligand, trimethyl phosphite can coordinate with transition metals, influencing catalytic activity and selectivity in various organic transformations. It is a valuable component in homogeneous catalysis research and development.
Chemical Synthesis
Trimethyl phosphite serves as a versatile reagent in organic synthesis, particularly in reactions involving phosphorus chemistry. It can be used in Arbuzov reactions and other P-C bond forming processes.
Materials Science and Electronics
With its high purity (≥99.999% trace metals basis), trimethyl phosphite is employed as a precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) processes. It is used for depositing thin films in microelectronic applications.
| Molecular weight | 124.08 |
|---|---|
| Linear formula | (CH3O)3P |
| Assay | ≥99.999% trace metals basis |
| Form | liquid |
| Boiling point | 111-112 °C(lit.) |
| Density | 1.052 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.408(lit.) |
| Melting point | −78 °C(lit.) |
| Vapour pressure | 17 mmHg (20 °C) |
| Vapour density | 4.3 (vs air) |
| Impurities tested | ≤0.5% trimethyl phosphate |



Hazard statements
- H226Flammable liquid and vapour
- H302Harmful if swallowed
- H315Causes skin irritation
- H318Causes serious eye damage
- H335May cause respiratory irritation
Precautionary statements
- P261Avoid breathing dust, fume, gas or vapours
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 28 °C / 82.4 °F |
| Transport (UN / ADR) | UN 2329 3 / PGIII |
| Water hazard class (WGK, DE) | 1 |
| Hazard codes (EU) | Xn |
| Risk statements (R) | 10-22-37/38-41 |
| Safety statements (S) | 26-39 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Trimethyl phosphite used for?
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Trimethyl phosphite (CAS: 121-45-9) is utilised as a phosphite ligand in catalysis, a reagent in chemical synthesis, and a precursor in CVD/ALD processes for thin film deposition in microelectronics. It is also classified under materials science and phosphine compounds.
What is the CAS number and formula for Trimethyl phosphite?
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The CAS number for Trimethyl phosphite is 121-45-9, and its linear formula is P(OCH3)3.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Trimethyl phosphite with an assay of ≥99.999% (trace metals basis). We do not represent this product as USP, BP, or EP grade.
How should Trimethyl phosphite be handled safely?
+
Trimethyl phosphite is a flammable liquid and vapour (H226), harmful if swallowed (H302), causes skin irritation (H315), causes serious eye damage (H318), and may cause respiratory irritation (H335). Appropriate personal protective equipment, including eyeshields, faceshields, and gloves, is essential. Handle in a well-ventilated area.
How is Trimethyl phosphite packed, shipped, and exported?
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As a specialist global supplier, Tech Serve Solutions exports Trimethyl phosphite adhering to all relevant shipping and safety regulations for hazardous materials like UN 2329.
How can I request a sample or quote for Trimethyl phosphite?
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To request a sample or a quote for Trimethyl phosphite, please contact our sales team through the TSS website, providing your specific requirements.
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