Tetramethyl orthosilicate
Tetramethyl orthosilicate (CAS: 681-84-5), with the chemical formula Si(OCH3)4 and a molecular weight of 152.22 g/mol, is a clear, colourless liquid. It serves as a crucial precursor in materials science and chemical synthesis, particularly in the sol-gel process for creating silicates and hexagonal mesoporous silica layers. Its deposition grade purity makes it suitable for advanced applications in micro/nanoelectronics.
- IUPAC
- Tetramethoxysilane
- Synonyms
- Tetramethoxysilane

Sol-Gel Synthesis
Tetramethyl orthosilicate is employed in the sol-gel synthesis of materials such as chromium-doped silicates. This method allows for precise control over material structure and properties at the nanoscale.
Mesoporous Silica Formation
It acts as a precursor in the formation of hexagonal mesoporous silica layers. These materials have applications in catalysis, adsorption, and separation technologies.
Microelectronics Precursor
With its high purity ('deposition grade'), Tetramethyl orthosilicate is utilised in microelectronics for thin film deposition processes. It is a key component in the fabrication of semiconductor devices.
| Molecular weight | 152.22 |
|---|---|
| Linear formula | Si(OCH3)4 |
| Assay | ≥99% |
| Grade | deposition grade |
| Form | liquid |
| Boiling point | 121-122 °C(lit.) |
| Density | 1.023 g/mL at 25 °C(lit.) |
| Melting point | −4 °C(lit.) |
| Refractive index | n20/D 1.368(lit.) |
| Vapour pressure | 3.35 psi (20 °C) |
| Vapour density | 5.25 (vs air) |
| Application | Used in the sol-gel synthesis of chromium-doped silicates1 and in the formation of hexagonal mesoporous silica layers.2 |



Hazard statements
- H226Flammable liquid and vapour
- H315Causes skin irritation
- H318Causes serious eye damage
- H330Fatal if inhaled
- H335May cause respiratory irritation
Precautionary statements
- P260Do not breathe dust, fume, gas, mist, vapours or spray
- P280Wear protective gloves, clothing and eye/face protection
- P284Wear respiratory protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 26 °C / 78.8 °F |
| Transport (UN / ADR) | UN 2606 3(6.1) / PGI |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | T+ |
| Risk statements (R) | 10-26-37/38-41 |
| Safety statements (S) | 16-26-36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tetramethyl orthosilicate used for?
+
Tetramethyl orthosilicate is used in sol-gel synthesis of silicates and hexagonal mesoporous silica layers, and as a precursor in micro/nanoelectronics fabrication.
What is the CAS number and chemical formula for Tetramethyl orthosilicate?
+
The CAS number is 681-84-5 and the chemical formula is Si(OCH3)4.
What grade and purity does Tech Serve Solutions supply?
+
Tech Serve Solutions supplies Tetramethyl orthosilicate in deposition grade with an assay of ≥99%. We do not represent this product as USP, BP, or EP grade.
How should Tetramethyl orthosilicate be handled safely?
+
Tetramethyl orthosilicate is a flammable liquid and vapour (H226), causes skin irritation (H315), serious eye damage (H318), is fatal if inhaled (H330), and may cause respiratory irritation (H335). Always handle with appropriate personal protective equipment, including eyeshields, gloves, and a full-face respirator, in a well-ventilated area.
How is Tetramethyl orthosilicate packed and shipped?
+
Tetramethyl orthosilicate is packed and shipped according to relevant transportation regulations for hazardous materials, including UN 2606. Tech Serve Solutions exports fine chemicals globally.
How can I request a quote or sample for Tetramethyl orthosilicate?
+
Please contact our sales team via the website or phone to request a quote or sample for Tetramethyl orthosilicate.
▶ Related products

1-(2-Fluorobenzyl)piperazine
C11H15FN2
Chemical Synthesis
1-(2-Fluorophenyl)biguanide hydrochloride
Chemical Synthesis

1-(2-Fluorophenyl)cyclopropanecarboxylic acid
C10H9FO2
Chemical Synthesis
1-(2-Fluorophenyl)piperazine
C10H13FN2
Chemical Synthesis
1-(2-Fluorophenyl)piperazine monohydrochloride
C10H13FN2 · HCl
Chemical Synthesis
1-(2-Furoyl)-1H-benzotriazole
C11H7N3O2
Chemical Synthesis
1-(2-Furoyl)piperazine
C9H12N2O2
Chemical Synthesis
1-(2-Hydroxy-5-methylphenyl)-3-phenyl-1,3-propanedione
Chemical Synthesis
▶ Explore more

3-Methyl-1,5-di-p-tolyl-1,4-pentazadiene
Chemical Synthesis

3-Methyl-1,5-pentanediol
Chemical Synthesis

3-Methyl-1-(2-methylphenyl)-1H-pyrazol-5-amine
C11H13N3
Chemical Synthesis
3-Methyl-1-(3′-sulfoamidophenyl)-5-pyrazolone
C10H11N3O3S
Chemical Synthesis