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Tetramethyl orthosilicate

CAS 681-84-5Si(OCH3)4Chemical Synthesis

Tetramethyl orthosilicate (CAS: 681-84-5), with the chemical formula Si(OCH3)4 and a molecular weight of 152.22 g/mol, is a clear, colourless liquid. It serves as a crucial precursor in materials science and chemical synthesis, particularly in the sol-gel process for creating silicates and hexagonal mesoporous silica layers. Its deposition grade purity makes it suitable for advanced applications in micro/nanoelectronics.

IUPAC
Tetramethoxysilane
Synonyms
Tetramethoxysilane
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Tetramethyl orthosilicate (Si(OCH3)4) — chemical structure, CAS 681-84-5; Chemistry, fine chemical supplied by Tech Serve Solutions
Chemical SynthesisMaterials ScienceMicro/NanoElectronicsOrganometallic ReagentsOrganosiliconSilicatesSilicon
01 /Applications

Sol-Gel Synthesis

Tetramethyl orthosilicate is employed in the sol-gel synthesis of materials such as chromium-doped silicates. This method allows for precise control over material structure and properties at the nanoscale.

Mesoporous Silica Formation

It acts as a precursor in the formation of hexagonal mesoporous silica layers. These materials have applications in catalysis, adsorption, and separation technologies.

Microelectronics Precursor

With its high purity ('deposition grade'), Tetramethyl orthosilicate is utilised in microelectronics for thin film deposition processes. It is a key component in the fabrication of semiconductor devices.

02 /Properties
Molecular weight152.22
Linear formulaSi(OCH3)4
Assay≥99%
Gradedeposition grade
Formliquid
Boiling point121-122 °C(lit.)
Density1.023 g/mL at 25 °C(lit.)
Melting point−4 °C(lit.)
Refractive indexn20/D 1.368(lit.)
Vapour pressure3.35 psi (20 °C)
Vapour density5.25 (vs air)
ApplicationUsed in the sol-gel synthesis of chromium-doped silicates1 and in the formation of hexagonal mesoporous silica layers.2
03 /Safety & handling
GHS hazard pictogram: Flammable (GHS02)
Flammable
GHS hazard pictogram: Corrosive (GHS05)
Corrosive
GHS hazard pictogram: Toxic (GHS06)
Toxic
Danger

Hazard statements

  • H226Flammable liquid and vapour
  • H315Causes skin irritation
  • H318Causes serious eye damage
  • H330Fatal if inhaled
  • H335May cause respiratory irritation

Precautionary statements

  • P260Do not breathe dust, fume, gas, mist, vapours or spray
  • P280Wear protective gloves, clothing and eye/face protection
  • P284Wear respiratory protection
  • P305IF IN EYES
  • P310Immediately call a POISON CENTER or doctor
Protective equipmentEyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
Flash point26 °C / 78.8 °F
Transport (UN / ADR)UN 2606 3(6.1) / PGI
Water hazard class (WGK, DE)3
Hazard codes (EU)T+
Risk statements (R)10-26-37/38-41
Safety statements (S)16-26-36/37/39-45

Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.

04 /Identifiers & registry
CAS number
681-84-5
MDL number
MFCD00008341
PubChem substance
24885480
Beilstein registry
1699658
05 /Quality & supply

Documentation

Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.

Supply & logistics

Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.

06 /Frequently asked questions

What is Tetramethyl orthosilicate used for?

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Tetramethyl orthosilicate is used in sol-gel synthesis of silicates and hexagonal mesoporous silica layers, and as a precursor in micro/nanoelectronics fabrication.

What is the CAS number and chemical formula for Tetramethyl orthosilicate?

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The CAS number is 681-84-5 and the chemical formula is Si(OCH3)4.

What grade and purity does Tech Serve Solutions supply?

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Tech Serve Solutions supplies Tetramethyl orthosilicate in deposition grade with an assay of ≥99%. We do not represent this product as USP, BP, or EP grade.

How should Tetramethyl orthosilicate be handled safely?

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Tetramethyl orthosilicate is a flammable liquid and vapour (H226), causes skin irritation (H315), serious eye damage (H318), is fatal if inhaled (H330), and may cause respiratory irritation (H335). Always handle with appropriate personal protective equipment, including eyeshields, gloves, and a full-face respirator, in a well-ventilated area.

How is Tetramethyl orthosilicate packed and shipped?

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Tetramethyl orthosilicate is packed and shipped according to relevant transportation regulations for hazardous materials, including UN 2606. Tech Serve Solutions exports fine chemicals globally.

How can I request a quote or sample for Tetramethyl orthosilicate?

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Please contact our sales team via the website or phone to request a quote or sample for Tetramethyl orthosilicate.

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