Tetrakis(ethylmethylamido)zirconium(IV)
Tetrakis(ethylmethylamido)zirconium(IV) (CAS: 175923-04-3, Formula: Zr(NCH3C2H5)4) is a chemical compound with a molecular weight of 323.63 g/mol. Supplied by Tech Serve Solutions as a liquid with a purity of ≥99.99% trace metals basis, this zirconium compound is primarily utilized as a precursor in advanced material deposition techniques such as Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD). Its specific properties make it valuable in microelectronics and materials science applications.
- IUPAC
- TEMAZ,Tetrakis(ethylmethylamino)zirconium(IV)
- Synonyms
- TEMAZ,Tetrakis(ethylmethylamino)zirconium(IV)
CVD and ALD Precursor
Utilised as a high-purity precursor for Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) processes. It enables the deposition of thin films containing zirconium.
Microelectronics Manufacturing
A key material in the micro/nanoelectronics industry for fabricating advanced semiconductor devices and components requiring precise thin-film deposition.
Materials Science
Employed in materials science research for developing novel materials and coatings with specific zirconium-based compositions, leveraging its vapour deposition capabilities.
Catalysis and Inorganic Synthesis
Applied in catalysis and inorganic chemistry as a reagent or precursor for synthesising various zirconium-containing compounds and materials.
| Molecular weight | 323.63 |
|---|---|
| Linear formula | Zr(NCH3C2H5)4 |
| Assay | ≥99.99% trace metals basis |
| Form | liquid |
| Boiling point | 81 °C/0.1 mmHg(lit.) |
| Density | 1.049 g/mL at 25 °C(lit.) |
Hazard statements
- H225Highly flammable liquid and vapour
- H261In contact with water releases flammable gas
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P231Handle under inert gas
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
- P422
| Flash point | 10 °C / 50 °F |
|---|---|
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xi |
| Risk statements (R) | 11-14/15-36/37/38 |
| Safety statements (S) | 16-26-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tetrakis(ethylmethylamido)zirconium(IV) used for?
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Tetrakis(ethylmethylamido)zirconium(IV) is predominantly used as a precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) for the fabrication of thin films in microelectronics and materials science.
What are the CAS number and formula for Tetrakis(ethylmethylamido)zirconium(IV)?
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The CAS number is 175923-04-3, and its chemical formula is Zr(NCH3C2H5)4.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tetrakis(ethylmethylamido)zirconium(IV) with an assay of ≥99.99% trace metals basis. We do not represent this product as USP, BP, or EP grade.
What are the main safety hazards associated with this compound?
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This compound is highly flammable (H225) and reacts with water (H261). It is also a skin irritant (H315), eye irritant (H319), and may cause respiratory irritation (H335). Handle with extreme caution in a well-ventilated area, away from ignition sources and moisture.
How is Tetrakis(ethylmethylamido)zirconium(IV) packaged and shipped?
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As a specialist global supplier, Tech Serve Solutions packages and exports fine chemicals like Tetrakis(ethylmethylamido)zirconium(IV) in compliance with international shipping regulations to ensure safe and secure delivery.
How can I request a quote or sample?
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To request a quote or a sample of Tetrakis(ethylmethylamido)zirconium(IV), please contact our sales team via the website or by phone, providing the product name and CAS number.
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