Tetrakis(ethylmethylamido)hafnium(IV)
Tetrakis(ethylmethylamido)hafnium(IV) (CAS: 352535-01-4, Formula: [(CH3)(C2H5)N]4Hf, MW: 410.90) is a hafnium precursor supplied by Tech Serve Solutions. This highly pure liquid chemical is primarily utilized as a precursor in chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes for thin film applications in microelectronics and materials science.
- IUPAC
- TEMAH,Tetrakis(ethylmethylamino)hafnium(IV)
- Synonyms
- TEMAH
![Tetrakis(ethylmethylamido)hafnium(IV) ([(CH3)(C2H5)N]4Hf) — chemical structure, CAS 352535-01-4; Chemistry, fine chemical supplied by Tech Serve Solutions](/_next/image?url=https%3A%2F%2Fpub-f4d920c906024441a773a96f7098e551.r2.dev%2Fimages%2Fproducts%2F352535-01-4.png&w=3840&q=75)
Atomic Layer Deposition (ALD)
This hafnium compound serves as a volatile precursor for depositing hafnium-based thin films, such as hafnium oxide (HfO2), via ALD. These films are critical for high-k dielectric layers in advanced semiconductor devices.
Chemical Vapor Deposition (CVD)
It can be employed in CVD processes to create hafnium-containing thin films for various material science applications, including protective coatings and semiconductor layers.
Materials Science Research
The compound's properties make it suitable for researchers exploring novel hafnium-based materials and their potential applications in catalysis, electronics, and advanced manufacturing.
Inorganic Synthesis
Tetrakis(ethylmethylamido)hafnium(IV) can act as a reagent in the synthesis of other hafnium-containing inorganic compounds and coordination complexes.
| Molecular weight | 410.90 |
|---|---|
| Linear formula | [(CH3)(C2H5)N]4Hf |
| Assay | ≥99.99% |
| Form | liquid |
| Boiling point | 78 °C/0.01 mmHg(lit.) |
| Density | 1.324 g/mL at 25 °C(lit.) |
| Storage temperature | 2-8°C |
| Melting point | <-50 °C |
Hazard statements
- H225Highly flammable liquid and vapour
- H261In contact with water releases flammable gas
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P231Handle under inert gas
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
- P422
| Flash point | 11 °C / 51.8 °F |
|---|---|
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xi |
| Risk statements (R) | 11-14-36/37/38 |
| Safety statements (S) | 16-26-36 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tetrakis(ethylmethylamido)hafnium(IV) used for?
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It is primarily used as a precursor in Atomic Layer Deposition (ALD) and Chemical Vapor Deposition (CVD) for creating hafnium-based thin films, especially for microelectronics and materials science research.
What are the CAS number and formula for Tetrakis(ethylmethylamido)hafnium(IV)?
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The CAS number is 352535-01-4 and the chemical formula is [(CH3)(C2H5)N]4Hf.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tetrakis(ethylmethylamido)hafnium(IV) with an assay of ≥99.99% purity. This is a high-purity grade suitable for demanding research and deposition applications. Tech Serve Solutions does not represent this product as USP, BP, EP, or pharmacopoeia grade.
What are the key safety considerations when handling this chemical?
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This compound is a flammable liquid (Flash Point: 11 °C) and reacts violently with water. It is also a respiratory irritant and causes skin and eye irritation. Handle with appropriate personal protective equipment (gloves, safety glasses, respirator) in a well-ventilated area, away from ignition sources and water. Refer to the Safety Data Sheet (SDS) for comprehensive handling guidelines.
How is Tetrakis(ethylmethylamido)hafnium(IV) packaged and shipped?
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This chemical is typically supplied in quantities suitable for laboratory and industrial use. It is packaged and shipped according to international regulations for hazardous materials, ensuring safe transit and delivery. TSS is a global supplier and exporter of this product.
How can I request a quote or sample?
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To request a quote or a sample of Tetrakis(ethylmethylamido)hafnium(IV), please contact our sales team through the TSS website or by phone. Provide your contact details and the quantity required.
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