Tetrakis(diethylamido)titanium(IV)
Tetrakis(diethylamido)titanium(IV), with CAS number 4419-47-0 and molecular formula [(C2H5)2N]4Ti, is a liquid titanium precursor. This compound, weighing 336.38 g/mol, is primarily utilized in organometallic chemical vapor deposition (OMCVD) for the creation of titanium nitride (TiN) thin films. Its high purity makes it suitable for advanced materials science and microelectronics applications requiring precise film deposition.
- IUPAC
- TDEAT,Tetrakis(diethylamino)titanium(IV),Titanium(IV) tetrakis(diethylamide)
- Synonyms
- TDEATTetrakis(diethylamino)titanium(IV)Titanium(IV) tetrakis(diethylamide)
![Tetrakis(diethylamido)titanium(IV) ([(C2H5)2N]4Ti) — chemical structure, CAS 4419-47-0; Chemistry, fine chemical supplied by Tech Serve Solutions](/_next/image?url=https%3A%2F%2Fpub-f4d920c906024441a773a96f7098e551.r2.dev%2Fimages%2Fproducts%2F4419-47-0.png&w=3840&q=75)
Titanium Nitride (TiN) Thin Film Deposition
Tetrakis(diethylamido)titanium(IV) serves as a key precursor in organometallic chemical vapor deposition (OMCVD) processes. It enables the deposition of high-quality titanium nitride (TiN) thin films, which are crucial in microelectronics for diffusion barriers and conductive layers.
Materials Science Research
This titanium compound is employed in materials science for the synthesis of novel titanium-containing materials and coatings. Its specific chemical structure allows for controlled incorporation of titanium into various material matrices.
Catalysis and Inorganic Chemistry
In catalysis and inorganic chemistry, Tetrakis(diethylamido)titanium(IV) can be investigated as a reagent for specific synthetic transformations or as a starting material for other titanium complexes.
| Molecular weight | 336.38 |
|---|---|
| Linear formula | [(C2H5)2N]4Ti |
| Assay | 99.999% trace metals basis |
| Form | liquid |
| Boiling point | 112 °C/0.1 mmHg(lit.) |
| Density | 0.931 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.536(lit.) |
| Application | Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD).1 |
Hazard statements
- H225Highly flammable liquid and vapour
- H260In contact with water releases flammable gases
- H314Causes severe skin burns and eye damage
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P223Do not allow contact with water
- P231Handle under inert gas
- P280Wear protective gloves, clothing and eye/face protection
- P370In case of fire
- P422
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | -28 °C / -18.4 °F |
| Transport (UN / ADR) | UN 3398 4.3/PG 1 |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 11-14/15-34 |
| Safety statements (S) | 26-36/37/39-43-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tetrakis(diethylamido)titanium(IV) used for?
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Tetrakis(diethylamido)titanium(IV) is principally used as a precursor for depositing titanium nitride (TiN) thin films via organometallic chemical vapor deposition (OMCVD).
What is the CAS number and formula for Tetrakis(diethylamido)titanium(IV)?
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The CAS number is 4419-47-0 and the linear formula is [(C2H5)2N]4Ti.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tetrakis(diethylamido)titanium(IV) with an assay of 99.999% trace metals basis. We do not represent this product as USP, BP, or EP grade.
What are the primary safety hazards associated with Tetrakis(diethylamido)titanium(IV)?
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This compound is highly flammable and reacts violently with water, releasing flammable gas. It also causes severe skin burns and eye damage. Handling requires strict adherence to safety protocols, including appropriate personal protective equipment and inert atmosphere conditions.
How is Tetrakis(diethylamido)titanium(IV) packed, shipped, and exported?
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As a specialist global supplier, Tech Serve Solutions ensures that Tetrakis(diethylamido)titanium(IV) is packed and shipped in accordance with all relevant international regulations for hazardous materials, including flammable liquids and water-reactive substances.
How can I request a sample or a quote for Tetrakis(diethylamido)titanium(IV)?
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To request a sample or a quote, please contact our sales team through the website or by phone, providing your specific requirements and shipping details.
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