Tetraethylgermanium
Tetraethylgermanium (CAS: 597-63-7; Formula: Ge(C2H5)4; Molar Mass: 188.88 g/mol) is an organogermanium compound supplied by TSS as a liquid. This chemical serves as a valuable precursor in material science applications, particularly in the deposition of germanium-containing thin films through chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes for microelectronic and semiconductor fabrication.

CVD and ALD Precursor
Tetraethylgermanium is employed as a precursor in chemical vapour deposition (CVD) and atomic layer deposition (ALD) techniques. It enables the deposition of germanium-based thin films, which are crucial for advanced semiconductor devices and microelectronic applications.
Germanium Thin Film Deposition
This compound is utilized for the controlled deposition of germanium and germanium-containing alloys. These films find applications in optoelectronics, high-performance transistors, and other areas requiring precise control over material composition and properties.
Materials Science Research
In materials science, Tetraethylgermanium is used in research and development for creating novel germanium-based materials. Its properties make it suitable for exploring new semiconductor technologies and advanced functional materials.
Chemical Synthesis
As an organometallic reagent, Tetraethylgermanium can be used in specific organic synthesis pathways. Its reactivity allows for the introduction of germanium into various molecular structures.
| Molecular weight | 188.88 |
|---|---|
| Linear formula | Ge(C2H5)4 |
| Assay | 99% |
| Form | liquid |
| Boiling point | 163-164 °C(lit.) |
| Density | 0.998 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.442(lit.) |


Hazard statements
- H226Flammable liquid and vapour
- H302Harmful if swallowed
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 35 °C / 95 °F |
| Transport (UN / ADR) | UN 1993C 3 / PGIII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | Xn |
| Risk statements (R) | 10-22-36/37/38 |
| Safety statements (S) | 16-26-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tetraethylgermanium used for?
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Tetraethylgermanium is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for creating germanium-containing thin films. These films are vital for microelectronics, semiconductor fabrication, and materials science research.
What are the CAS number and formula for Tetraethylgermanium?
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The CAS number for Tetraethylgermanium is 597-63-7, and its chemical formula is Ge(C2H5)4.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tetraethylgermanium with an assay of 99%. This product is not classified as USP, BP, or EP grade.
How should Tetraethylgermanium be handled safely?
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Tetraethylgermanium is a flammable liquid and vapour (H226) and can be harmful if swallowed (H302), and causes skin irritation (H315), serious eye irritation (H319), and may cause respiratory irritation (H335). Handle with appropriate personal protective equipment, including safety glasses, face shields, and suitable respirators, in a well-ventilated area, away from ignition sources.
How is Tetraethylgermanium packed and shipped?
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Tetraethylgermanium is packed as a liquid and is shipped according to relevant regulations for hazardous materials, including UN 1993, Hazard Class 3, Packing Group III.
How can I request a sample or quote for Tetraethylgermanium?
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To request a sample or a quote for Tetraethylgermanium, please contact the Tech Serve Solutions sales team through our website or by phone.
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