Silicon tetrafluoride
Silicon tetrafluoride (CAS 7783-61-1), molecular formula SiF4, is a high-purity chemical supplied by Tech Serve Solutions for chemical synthesis applications, to pharmacopoeia specification (USP, BP, EP). Every batch is tested and ships with a Certificate of Analysis; MSDS and technical data sheets are available on request. Tech Serve Solutions has supplied laboratory reagents, fine chemicals and pharmaceutical intermediates worldwide since 1998.
- IUPAC
- Silicon(IV) fluoride

| Molecular weight | 104.08 |
|---|---|
| Linear formula | SiF4 |
| Assay | ≥99.99% |
| Grade | electronic grade |
| Boiling point | −86 °C(lit.) |
| Density | 3.57 g/mL at 25 °C(lit.) |
| Impurities tested | <50 ppm Hydrogen fluoride (HF) |
| Melting point | −90 °C(lit.) |
| Application | Silicon tetrafluoride is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. Mixtures of SiF4-SiH4-H2 have recently been used to deposit polycrystalline silicon thin films via remote plasma chemical vapor deposition (RPCVD).1,2 Such fluorinated thin films show visible photoluminescence (PL) at room temperature.3 |


Hazard statements
- H300Fatal if swallowed
- H314Causes severe skin burns and eye damage
Precautionary statements
- P260Do not breathe dust, fume, gas, mist, vapours or spray
- P264Wash thoroughly after handling
- P280Wear protective gloves, clothing and eye/face protection
- P284Wear respiratory protection
- P301IF SWALLOWED
- P302IF ON SKIN
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 1859 8(2.3) |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | T+ |
| Risk statements (R) | 14-26/27/28-31-34 |
| Safety statements (S) | 23-26-36/37/39-45 |
| Supplemental hazards | Contact with water liberates toxic gas., Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Transition Temp | critical temperature −14.2 °C |
|---|
Documentation
Supplied to USP, BP and EP standards. Every batch ships with a Certificate of Analysis (assay, identity, purity); MSDS and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Silicon tetrafluoride?
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Silicon tetrafluoride (CAS 7783-61-1), molecular formula SiF4, is a high-purity chemical supplied by Tech Serve Solutions for chemical synthesis applications, to USP, BP and EP standards.
What grades of Silicon tetrafluoride does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Silicon tetrafluoride in USP, BP, EP and reagent/AR grades. Custom specifications for nutraceutical or specialty pharmaceutical applications are available — contact our technical sales team.
What is the CAS number and molecular formula of Silicon tetrafluoride?
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Silicon tetrafluoride has CAS number 7783-61-1 and molecular formula SiF4. Full specifications appear in the table above and in the Certificate of Analysis.
What is the typical minimum order quantity and lead time for Silicon tetrafluoride?
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Sample quantities are available for technical evaluation; bulk MOQ depends on grade and packaging. In-stock material typically ships in 7–10 working days; custom-spec orders take 3–4 weeks. Tech Serve Solutions ships worldwide with full export documentation.
Do you provide a Certificate of Analysis (CoA) with each shipment?
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Yes. Every batch of Silicon tetrafluoride ships with a Certificate of Analysis covering assay, identity and purity tests, plus pharmacopoeia conformance where applicable. MSDS and TDS documents are available on request before order placement.
How should Silicon tetrafluoride be stored?
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Store Silicon tetrafluoride in its original sealed container in a cool, dry place away from direct sunlight and incompatible materials, in line with the storage guidance on the Safety Data Sheet. Reseal between dispensings.
What is Silicon tetrafluoride used for?
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Silicon tetrafluoride is used in chemical synthesis applications across pharmaceutical, research and industrial settings. Our technical team can advise on suitability for your specific process.
How do I request a quote for Silicon tetrafluoride?
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Request a quote with your required grade, quantity and destination via https://www.techservesolutions.in/contact or email info@techservesolutions.in. We respond with specifications, a Certificate of Analysis and pricing.
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