Silicon tetrafluoride
Silicon tetrafluoride (CAS: 7783-61-1, Formula: SiF4, Molar Mass: 104.08 g/mol) is a colourless gas with a pungent odour. This compound is primarily utilised in specialized industrial processes, including ion-implantation and as a precursor for fluorinated silica in plasma-assisted Chemical Vapour Deposition (CVD). It is also employed in the deposition of polycrystalline silicon thin films through remote plasma CVD.
- IUPAC
- Silicon(IV) fluoride
Ion Implantation Processes
Silicon tetrafluoride serves as a critical dopant source in ion-implantation processes used in semiconductor manufacturing. Its controlled delivery enables precise doping of silicon wafers.
Plasma-Assisted CVD
This compound is a precursor for the deposition of fluorinated silica films via plasma-assisted Chemical Vapour Deposition (CVD). It is also used in mixtures with SiH4 and H2 for depositing polycrystalline silicon thin films.
Materials Science Research
Silicon tetrafluoride is investigated for its role in creating novel fluorinated thin films exhibiting room-temperature photoluminescence, contributing to advancements in materials science.
| Molecular weight | 104.08 |
|---|---|
| Linear formula | SiF4 |
| Assay | ≥99.99% |
| Grade | electronic grade |
| Boiling point | −86 °C(lit.) |
| Density | 3.57 g/mL at 25 °C(lit.) |
| Impurities tested | <50 ppm Hydrogen fluoride (HF) |
| Melting point | −90 °C(lit.) |
| Application | Silicon tetrafluoride is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. Mixtures of SiF4-SiH4-H2 have recently been used to deposit polycrystalline silicon thin films via remote plasma chemical vapor deposition (RPCVD).1,2 Such fluorinated thin films show visible photoluminescence (PL) at room temperature.3 |
Hazard statements
- H300Fatal if swallowed
- H314Causes severe skin burns and eye damage
Precautionary statements
- P260Do not breathe dust, fume, gas, mist, vapours or spray
- P264Wash thoroughly after handling
- P280Wear protective gloves, clothing and eye/face protection
- P284Wear respiratory protection
- P301IF SWALLOWED
- P302IF ON SKIN
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 1859 8(2.3) |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | T+ |
| Risk statements (R) | 14-26/27/28-31-34 |
| Safety statements (S) | 23-26-36/37/39-45 |
| Supplemental hazards | Contact with water liberates toxic gas., Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Transition Temp | critical temperature −14.2 °C |
|---|
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What are the primary applications of Silicon tetrafluoride?
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Silicon tetrafluoride is used in ion-implantation processes and as a precursor to fluorinated silica via plasma-assisted CVD. It is also utilized for depositing polycrystalline silicon thin films.
What is the CAS number and chemical formula for Silicon tetrafluoride?
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The CAS number for Silicon tetrafluoride is 7783-61-1, and its chemical formula is SiF4.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Silicon tetrafluoride in electronic grade with an assay of ≥99.99%. We do not represent this product as USP, BP, or EP grade.
How is Silicon tetrafluoride safely handled?
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Silicon tetrafluoride is a dangerous gas that reacts violently with water, liberating toxic gas. Extreme caution is required. Handle only with full protective equipment including a faceshield, full-face respirator, gloves, and goggles in a well-ventilated area or fume hood. Refer to the Safety Data Sheet for comprehensive handling procedures.
How is Silicon tetrafluoride packed, shipped, and exported?
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Silicon tetrafluoride is shipped as a compressed gas under specific UN classifications. Tech Serve Solutions, as a specialist global supplier and exporter, ensures compliance with all international shipping and export regulations for hazardous materials.
How can I request a quote or sample of Silicon tetrafluoride?
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To request a quote or sample of Silicon tetrafluoride, please contact our sales department through the website or by phone, providing your specific requirements and shipping details.
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