Silicon tetrachloride
Silicon tetrachloride (CAS: 10026-04-7, Formula: SiCl₄) is a colourless liquid with a pungent odour. It is a crucial inorganic compound with a molecular weight of 169.90 g/mol. Silicon tetrachloride serves as a foundational material in various advanced technological applications, including the production of high-purity silicon, silica, and as a precursor in semiconductor manufacturing processes like Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD).
- IUPAC
- STC,Tetrachlorosilane
- Synonyms
- STCTetrachlorosilane

Semiconductor Manufacturing
Silicon tetrachloride is widely employed as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) processes for fabricating microelectronic devices. It enables the deposition of high-purity silicon dioxide and silicon nitride layers essential for integrated circuits.
Materials Science
This compound is utilized in materials science for the synthesis of advanced silicon-based materials. It plays a role in the production of optical fibres and specialized glasses due to its ability to yield high-purity silica.
Chemical Synthesis
As a reactive intermediate, silicon tetrachloride is used in various chemical synthesis pathways. It serves as a source of silicon in the preparation of organosilicon compounds and other silicon derivatives.
Protecting and Derivatizing Agent
In organic chemistry, silicon tetrachloride can be employed as a protecting group reagent for alcohols and other functional groups. It is also used for derivatization to facilitate analysis.
| Molecular weight | 169.90 |
|---|---|
| Linear formula | SiCl4 |
| Form | liquid |
| Boiling point | 57.6 °C(lit.) |
| Density | 1.483 g/mL at 25 °C(lit.) |
| Concentration | 1.0 M in methylene chloride |
| Vapour pressure | 420 mmHg (37.7 °C) |
| Melting point | −70 °C(lit.) |
| Vapour density | 5.86 (vs air) |


Hazard statements
- H301Toxic if swallowed
- H314Causes severe skin burns and eye damage
- H335May cause respiratory irritation
Precautionary statements
- P261Avoid breathing dust, fume, gas or vapours
- P280Wear protective gloves, clothing and eye/face protection
- P301IF SWALLOWED
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 1818 8 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 14-20/22-35-37 |
| Safety statements (S) | 7/8-26 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Silicon tetrachloride used for?
+
Silicon tetrachloride (CAS: 10026-04-7) is primarily used as a precursor in semiconductor manufacturing for CVD and ALD processes, in materials science for producing high-purity silicon and silica, and in chemical synthesis.
What is the CAS number and chemical formula for Silicon tetrachloride?
+
The CAS number for Silicon tetrachloride is 10026-04-7, and its chemical formula is SiCl₄.
What grade and purity does Tech Serve Solutions supply?
+
Tech Serve Solutions supplies Silicon tetrachloride in a 1.0 M concentration in methylene chloride. We do not represent this product as USP, BP, or EP grade; it is suitable for research and technical applications.
How should Silicon tetrachloride be handled safely?
+
Silicon tetrachloride is corrosive and reacts violently with water. It is toxic if inhaled or swallowed. Handle with extreme caution in a well-ventilated area, wearing appropriate personal protective equipment including gloves, eye protection, and respiratory protection. Refer to the Safety Data Sheet for detailed handling procedures.
How is Silicon tetrachloride packed, shipped, and exported?
+
Silicon tetrachloride is packed and shipped according to international regulations for hazardous materials. TSS exports this chemical globally, ensuring compliance with all relevant transport and customs requirements.
How can I request a sample or quote for Silicon tetrachloride?
+
To request a sample or a quote for Silicon tetrachloride, please contact our sales team through the website or by phone, providing your specific requirements.
▶ Related products

1-(2-Fluorobenzyl)piperazine
C11H15FN2
Chemical Synthesis
1-(2-Fluorophenyl)biguanide hydrochloride
Chemical Synthesis

1-(2-Fluorophenyl)cyclopropanecarboxylic acid
C10H9FO2
Chemical Synthesis
1-(2-Fluorophenyl)piperazine
C10H13FN2
Chemical Synthesis
1-(2-Fluorophenyl)piperazine monohydrochloride
C10H13FN2 · HCl
Chemical Synthesis
1-(2-Furoyl)-1H-benzotriazole
C11H7N3O2
Chemical Synthesis
1-(2-Furoyl)piperazine
C9H12N2O2
Chemical Synthesis
1-(2-Hydroxy-5-methylphenyl)-3-phenyl-1,3-propanedione
Chemical Synthesis
▶ Explore more

3-Methyl-1,5-di-p-tolyl-1,4-pentazadiene
Chemical Synthesis

3-Methyl-1,5-pentanediol
Chemical Synthesis

3-Methyl-1-(2-methylphenyl)-1H-pyrazol-5-amine
C11H13N3
Chemical Synthesis
3-Methyl-1-(3′-sulfoamidophenyl)-5-pyrazolone
C10H11N3O3S
Chemical Synthesis