Molybdenumhexacarbonyl
Molybdenumhexacarbonyl, CAS 13939-06-5, with the chemical formula Mo(CO)₆ and a molar mass of 264.00 g/mol, is a volatile solid compound. It serves as a crucial precursor in various chemical processes. This compound is widely utilized in chemical vapour deposition (CVD) and atomic layer deposition (ALD) for thin film applications, as well as in catalysis and advanced materials science.
- IUPAC
- Hexacarbonylmolybdenum(0)

Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD)
Molybdenumhexacarbonyl is a key precursor for depositing thin films of molybdenum or molybdenum-containing compounds via CVD and ALD techniques. These films are essential in microelectronics and advanced coatings.
Catalysis
This compound finds application as a catalyst or catalyst precursor in various organic syntheses. Its ability to introduce molybdenum into catalytic systems makes it valuable for promoting specific chemical transformations.
Materials Science Research
It is employed in materials science for the synthesis of novel molybdenum-based materials and nanostructures. Its controlled decomposition allows for precise material fabrication.
Inorganic Synthesis
Molybdenumhexacarbonyl is used as a starting material in the synthesis of other molybdenum complexes and inorganic compounds, offering a convenient route to incorporate molybdenum into new chemical entities.
| Molecular weight | 264.00 |
|---|---|
| Linear formula | Mo(CO)6 |
| Assay | ≥99.9% trace metals basis |
| Form | solidsolid |
| Boiling point | 156 °C(lit.) |
| Density | 1.96 g/mL at 25 °C(lit.) |
| Vapour density | 9.1 (vs air) |
| Melting point | 150 °C (dec.)(lit.) |

Hazard statements
- H300Fatal if swallowed
- H310Fatal in contact with skin
- H330Fatal if inhaled
Precautionary statements
- P260Do not breathe dust, fume, gas, mist, vapours or spray
- P264Wash thoroughly after handling
- P280Wear protective gloves, clothing and eye/face protection
- P284Wear respiratory protection
- P301IF SWALLOWED
- P302IF ON SKIN
| Protective equipment | Eyeshields, Faceshields, Gloves, type P2 (EN 143) respirator cartridges |
|---|---|
| Transport (UN / ADR) | UN 3466 6.1 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | T+ |
| Risk statements (R) | 26/27/28 |
| Safety statements (S) | 36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Purified By | sublimation |
|---|
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Molybdenumhexacarbonyl used for?
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Molybdenumhexacarbonyl (CAS 13939-06-5) is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for thin film applications, and as a catalyst or catalyst precursor in various chemical syntheses and materials science research.
What is the CAS number and chemical formula for Molybdenumhexacarbonyl?
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The CAS number for Molybdenumhexacarbonyl is 13939-06-5, and its chemical formula is Mo(CO)₆.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Molybdenumhexacarbonyl with a purity of ≥99.9% (trace metals basis), purified by sublimation. We do not represent this product as USP, BP, EP or any other pharmacopoeia grade.
What are the primary hazards associated with Molybdenumhexacarbonyl?
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Molybdenumhexacarbonyl is classified as Danger. It is acutely toxic if swallowed (H300), acutely toxic in contact with skin (H310), and acutely toxic if inhaled (H330). Appropriate personal protective equipment, including eyeshields, face shields, gloves, and P2 respirator cartridges, must be used during handling.
How is Molybdenumhexacarbonyl packed, shipped, and exported?
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Molybdenumhexacarbonyl is supplied by Tech Serve Solutions, a global supplier and exporter. Packaging and shipping adhere to all relevant safety and transportation regulations for hazardous materials (UN 3466, 6.1/PGII).
How can I request a sample or quote for Molybdenumhexacarbonyl?
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To request a sample or a quote for Molybdenumhexacarbonyl, please contact the Tech Serve Solutions sales department via our website or direct inquiry channels.
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