Fluorotrimethylsilane
Fluorotrimethylsilane (CAS 420-56-4), with the linear formula (CH₃)₃SiF and a molecular weight of 92.19 g/mol, is a highly flammable and volatile liquid. It is primarily utilised as a synthetic reagent in organic and organometallic chemistry. Its reactivity makes it valuable for introducing trimethylsilyl groups and as a source of fluoride ions in various chemical transformations. It is supplied with an assay of 96%.
- IUPAC
- Trimethylfluorosilane,Trimethylsilyl fluoride
- Synonyms
- TrimethylfluorosilaneTrimethylsilyl fluoride

Fluorinating Agent
Fluorotrimethylsilane serves as a convenient reagent for introducing fluorine atoms into organic molecules. Its controlled reactivity allows for selective fluorination reactions in the synthesis of complex compounds.
Trimethylsilylating Agent
This compound is employed to introduce the trimethylsilyl (TMS) group, which is a common protecting group in organic synthesis. The TMS group can stabilise intermediates or modify the properties of target molecules.
Specialty Gas Applications
Due to its volatility, Fluorotrimethylsilane finds application in processes requiring a gaseous source of trimethylsilyl or fluoride species. Careful handling is essential due to its flammability and potential to release hazardous vapours.
Research and Development
In laboratory settings, Fluorotrimethylsilane is a valuable reagent for exploring new synthetic pathways and developing novel materials. Its unique chemical properties enable diverse research applications.
| Molecular weight | 92.19 |
|---|---|
| Linear formula | (CH3)3SiF |
| Assay | 96% |
| Boiling point | 16 °C(lit.) |
| Density | 0.793 g/mL at 25 °C(lit.) |
| Melting point | −74 °C(lit.) |



Hazard statements
- H224Extremely flammable liquid and vapour
- H280Contains gas under pressure; may explode if heated
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
- P410Protect from sunlight
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US) |
|---|---|
| Flash point | -30 °C / -22 °F |
| Transport (UN / ADR) | UN 1954 2.1 |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F+,Xi |
| Risk statements (R) | 12-36/37/38 |
| Safety statements (S) | 9-16-26-33 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Fluorotrimethylsilane used for?
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Fluorotrimethylsilane is primarily used as a synthetic reagent in chemical synthesis, including as a fluorinating and trimethylsilylating agent, and for applications requiring a specialty gas.
What is the CAS number and formula for Fluorotrimethylsilane?
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The CAS number is 420-56-4, and the linear formula is (CH₃)₃SiF.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Fluorotrimethylsilane with an assay of 96%. We do not represent this product as meeting any pharmacopoeia standards such as USP, BP, or EP unless explicitly stated.
How should Fluorotrimethylsilane be handled safely?
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Fluorotrimethylsilane is highly flammable and an irritant. Handle with appropriate personal protective equipment, including eyeshields, gloves, and a full-face respirator. Ensure use in a well-ventilated area away from ignition sources, adhering to hazard statements H224, H280, H315, H319, and H335.
How is Fluorotrimethylsilane packed and shipped?
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Fluorotrimethylsilane is packed according to UN 1954 specifications for flammable gases and is exported globally by Tech Serve Solutions.
How can I request a quote or sample?
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To request a quote or sample, please contact our sales team through the website or by phone, providing the product name and CAS number (420-56-4).
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