Ethoxytrimethylsilane
Ethoxytrimethylsilane (CAS: 1825-62-3), with the molecular formula C2H5OSi(CH3)3 and a molar mass of 118.25 g/mol, is a mono-alkoxy silane. It is primarily utilised in materials science and micro/nanoelectronics applications. This liquid compound serves as a valuable reagent in various chemical syntheses and surface modification processes, including self-assembly techniques.
- IUPAC
- Trimethylethoxysilane
- Synonyms
- Trimethylethoxysilane

Materials Science
Utilised in the development and modification of advanced materials. Its silane structure allows for integration into polymer matrices or surface treatments to enhance material properties.
Micro/Nanoelectronics
Employed in processes requiring precise surface control and deposition. Its properties make it suitable for applications in semiconductor manufacturing and the creation of nanoscale devices.
Surface Modification
Acts as a silylating agent to modify the surface properties of various substrates. This can alter hydrophobicity, reactivity, or adhesion characteristics.
Self-Assembly
Contributes to the formation of ordered molecular layers on surfaces. This is critical for applications in nanotechnology and advanced coatings.
| Molecular weight | 118.25 |
|---|---|
| Linear formula | C2H5OSi(CH3)3 |
| Assay | 98% |
| Form | liquid |
| Boiling point | 75-76 °C(lit.) |
| Density | 0.757 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.374(lit.) |


Hazard statements
- H225Highly flammable liquid and vapour
- H302Harmful if swallowed
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | -18 °C / -.4 °F |
| Transport (UN / ADR) | UN 1993BF 3 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xn |
| Risk statements (R) | 11-22-36/37/38 |
| Safety statements (S) | 16-26 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Ethoxytrimethylsilane used for?
+
Ethoxytrimethylsilane is primarily used in materials science and micro/nanoelectronics applications for surface modification and self-assembly processes.
What is the CAS number and formula for Ethoxytrimethylsilane?
+
The CAS number is 1825-62-3 and the molecular formula is C2H5OSi(CH3)3.
What grade and purity does Tech Serve Solutions supply?
+
Tech Serve Solutions supplies Ethoxytrimethylsilane with an assay of 98%. This product is not represented as USP, BP, or EP grade.
What are the main safety hazards associated with Ethoxytrimethylsilane?
+
Ethoxytrimethylsilane is a highly flammable liquid and vapour (H225). It is harmful if swallowed (H302) and causes skin (H315), serious eye (H319), and respiratory irritation (H335). Handle with appropriate personal protective equipment.
How is Ethoxytrimethylsilane packed, shipped, and exported?
+
Ethoxytrimethylsilane is shipped as a flammable liquid, UN 1993, Packing Group II, adhering to strict international regulations for hazardous material transport.
How can I request a quote or sample for Ethoxytrimethylsilane?
+
To request a quote or sample, please contact our sales team through the website or by phone, providing your specific requirements.
▶ Related products

(11-Mercaptoundecyl)-N,N,N-trimethylammonium bromide
Micro / NanoElectronics

(11-Mercaptoundecyl)hexa(ethylene glycol)
C23H48O7S
Micro / NanoElectronics
(12-Phosphonododecyl)phosphonic acid
C12H28O6P2
Micro / NanoElectronics
(2,2,3,3,4,4,5,5,6,6,7,7,7-Tridecafluoroheptyl)oxirane
C9H5F13O
Micro / NanoElectronics
(2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,9-Heptadecafluorononyl)oxirane
C11H5F17O
Micro / NanoElectronics
(3-Chloropropyl)dimethoxymethylsilane
Cl(CH2)3Si(OCH3)2CH3
Micro / NanoElectronics
(3-Chloropropyl)trimethoxysilane
Cl(CH2)3Si(OCH3)3
Micro / NanoElectronics
(4-Bromophenyl)diphenylsulfonium triflate
C19H14BrF3O3S2
Micro / NanoElectronics▶ Explore more

3-Methyl-1,5-di-p-tolyl-1,4-pentazadiene
Chemical Synthesis

3-Methyl-1,5-pentanediol
Chemical Synthesis

3-Methyl-1-(2-methylphenyl)-1H-pyrazol-5-amine
C11H13N3
Chemical Synthesis
3-Methyl-1-(3′-sulfoamidophenyl)-5-pyrazolone
C10H11N3O3S
Chemical Synthesis