Dodecamethylcyclohexasilane

CAS 4098-30-0(Si(CH3)2)6Micro / NanoElectronics

Dodecamethylcyclohexasilane (CAS: 4098-30-0) is an organosilicon compound with the linear formula (Si(CH3)2)6 and a molecular weight of 348.93 g/mol. It serves as a valuable precursor in advanced material science and microelectronics applications. Its specific chemical structure makes it suitable for controlled deposition processes, contributing to the development of specialised thin films and electronic components.

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Dodecamethylcyclohexasilane ((Si(CH3)2)6) — chemical structure, CAS 4098-30-0; Materials Science, fine chemical supplied by Tech Serve Solutions

Materials ScienceMicro/NanoElectronicsSiliconVapor Deposition Precursors

01 /Applications

Chemical Vapour Deposition (CVD)

Dodecamethylcyclohexasilane is employed as a precursor in CVD processes for depositing silicon-containing thin films. It enables the formation of high-purity silicon carbide or silicon nitride layers essential for semiconductor manufacturing and protective coatings.

Atomic Layer Deposition (ALD)

This compound acts as a silicon source in ALD, allowing for precise and conformal thin film deposition at the atomic scale. It is utilised in the fabrication of advanced microelectronic devices and nanostructures requiring exceptional control over film thickness and composition.

Materials Science Research

Researchers utilise Dodecamethylcyclohexasilane in materials science to explore novel silicon-based materials and composites. Its unique properties facilitate the synthesis of materials with tailored electronic and optical characteristics.

Micro/Nanoelectronics Fabrication

The compound finds application in the fabrication of integrated circuits and other micro/nanoelectronic components. It contributes to the deposition of critical dielectric or conductive layers in semiconductor processing.

02 /Properties

Molecular weight	348.93
Linear formula	(Si(CH3)2)6
Assay	≥97% (GC)
Melting point	229 °C(lit.)

03 /Safety & handling

Protective equipment	Eyeshields, Gloves, type N95 (US), type P1 (EN143) respirator filter
Water hazard class (WGK, DE)	3

Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.

04 /Identifiers & registry

CAS number

4098-30-0

MDL number

MFCD00053564

PubChem substance

24867378

05 /Quality & supply

Documentation

Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.

Supply & logistics

Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.

06 /Frequently asked questions

What is Dodecamethylcyclohexasilane used for?

Dodecamethylcyclohexasilane is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for creating silicon-containing thin films, particularly in microelectronics and materials science.

What is the CAS number and chemical formula for Dodecamethylcyclohexasilane?

The CAS number is 4098-30-0, and its linear chemical formula is (Si(CH3)2)6.

What grade and purity does Tech Serve Solutions supply?

Tech Serve Solutions supplies Dodecamethylcyclohexasilane with an assay of ≥97% (GC). This product is not represented as USP, BP, EP, or other pharmacopoeial grades.

What are the safety and handling requirements for Dodecamethylcyclohexasilane?

Handle Dodecamethylcyclohexasilane with appropriate personal protective equipment, including eyeshields and gloves. Ensure adequate ventilation and use a type N95 (US) or type P1 (EN143) respirator filter if necessary. It is classified with WGK 2 in Germany.

How is Dodecamethylcyclohexasilane packed and shipped?

Dodecamethylcyclohexasilane is carefully packed to ensure integrity during transit and is exported globally by Tech Serve Solutions in compliance with all relevant shipping regulations.

How can I request a quote or sample for Dodecamethylcyclohexasilane?

To request a quote or sample of Dodecamethylcyclohexasilane, please contact the Tech Serve Solutions sales team through our website or via direct inquiry.