Carbon tetrafluoride
Carbon tetrafluoride (CF4), CAS 75-73-0, is a stable, non-flammable gas with a molecular weight of 88.00 g/mol. This perfluorocarbon finds extensive application in the electronics industry for plasma etching and cleaning processes, particularly in semiconductor manufacturing. Its inert nature and ability to generate fluorocarbon radicals make it a crucial component in microelectronics fabrication. Tech Serve Solutions supplies this high-purity gas for advanced material processing and chemical synthesis.
Semiconductor Manufacturing
Carbon tetrafluoride is widely used as a plasma etching gas in the fabrication of semiconductors and integrated circuits. It is employed for etching silicon dioxide, silicon nitride, and other dielectric materials with high selectivity and anisotropy.
Chemical Synthesis
As a source of fluorine radicals, CF4 can be utilised in certain fluorination reactions within chemical synthesis. Its inertness allows for controlled introduction of fluorine into organic molecules under specific plasma conditions.
Materials Science Research
In materials science, carbon tetrafluoride is used for surface modification and deposition processes. It can be employed in plasma-enhanced chemical vapour deposition (PECVD) to create fluorocarbon films with specific properties.
Cleaning Applications
CF4 gas serves as an effective cleaning agent in vacuum chambers and semiconductor processing equipment. It removes residual films and contaminants, ensuring the integrity of subsequent manufacturing steps.
| Molecular weight | 88.00 |
|---|---|
| Linear formula | CF4 |
| Assay | 99.9% |
| Boiling point | −130 °C(lit.) |
| Vapour density | 3.04 (vs air) |
| Melting point | −184 °C(lit.) |
Hazard statements
- H280Contains gas under pressure; may explode if heated
Precautionary statements
- P410Protect from sunlight
| Protective equipment | Eyeshields, Gloves, half-mask respirator (EU), half-mask respirator (US), multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 1982 2.2 |
| Water hazard class (WGK, DE) | 3 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Carbon tetrafluoride (CF4) primarily used for?
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Carbon tetrafluoride (CF4) is primarily used in the semiconductor industry for plasma etching and chamber cleaning during the manufacturing of integrated circuits. It also finds applications in chemical synthesis and materials science.
What is the CAS number and chemical formula for Carbon tetrafluoride?
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The CAS number for Carbon tetrafluoride is 75-73-0, and its chemical formula is CF4.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Carbon tetrafluoride with an assay of 99.9%. We do not represent this product as USP, BP, or EP grade.
How is Carbon tetrafluoride supplied and shipped?
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Carbon tetrafluoride is supplied as a gas. Shipping and export are managed according to regulations for compressed gases, indicated by UN 1982 2.2.
What are the main safety hazards associated with Carbon tetrafluoride?
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Carbon tetrafluoride is supplied under pressure and contains gas under pressure (H280), which may explode if heated (GHS04, Warning). Appropriate personal protective equipment, including eyeshields, gloves, and respiratory protection, should be used. Store and use in well-ventilated areas, keeping away from heat (P410 + P403).
How can I request a quote or sample for Carbon tetrafluoride?
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To request a quote or sample for Carbon tetrafluoride, please contact the Tech Serve Solutions sales team through our website or directly via email or phone.
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