2,4,6,8,10-Pentamethylcyclopentasiloxane
2,4,6,8,10-Pentamethylcyclopentasiloxane (CAS: 6166-86-5) is an organosilicon compound with the linear formula (CH3SiHO)5 and a molecular weight of 300.64 g/mol. This liquid chemical serves as a valuable precursor in material science, microelectronics, and chemical synthesis. Its properties make it suitable for applications such as Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD).
- Synonyms
- 8,10-Pentamethylcyclopentasiloxane(CH3SiHO)5

CVD and ALD Precursor
Utilised in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) processes for creating thin films and coatings in microelectronics manufacturing. It serves as a source of silicon-containing layers.
Chemical Synthesis
Acts as a building block or reagent in the synthesis of more complex organosilicon compounds and polymers. Its reactive Si-H bonds allow for diverse chemical transformations.
Materials Science
Investigated and employed in materials science for the development of novel silicon-based materials with specific thermal, electrical, or optical properties.
Microelectronics
Contributes to the fabrication of microelectronic devices by enabling precise deposition of silicon-containing materials essential for semiconductor components.
| Molecular weight | 300.64 |
|---|---|
| Linear formula | (CH3SiHO)5 |
| Assay | 96% |
| Form | liquid |
| Boiling point | 54 °C/10 mmHg(lit.) |
| Density | 0.992 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.392(lit.) |
| Storage temperature | 2-8°C |

Hazard statements
- H226Flammable liquid and vapour
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 37 °C / 98.6 °F |
| Transport (UN / ADR) | UN 1993C 3 / PGIII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | Xi |
| Risk statements (R) | 10-36/37/38 |
| Safety statements (S) | 16-26-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is 2,4,6,8,10-Pentamethylcyclopentasiloxane used for?
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This compound is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for microelectronics, as well as in chemical synthesis and materials science.
What is the CAS number and chemical formula for 2,4,6,8,10-Pentamethylcyclopentasiloxane?
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The CAS number is 6166-86-5 and the linear formula is (CH3SiHO)5.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies 2,4,6,8,10-Pentamethylcyclopentasiloxane with an assay of 96%. This is a research or technical grade material and is not represented as USP, BP, or EP grade.
How should 2,4,6,8,10-Pentamethylcyclopentasiloxane be handled safely?
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This compound is a flammable liquid and vapour (H226). It can cause eye, skin, and respiratory irritation (36/37/38). Always use in a well-ventilated area, away from ignition sources, and wear appropriate personal protective equipment including safety goggles, gloves, and suitable respiratory protection.
How is 2,4,6,8,10-Pentamethylcyclopentasiloxane packed, shipped, and exported?
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As a global supplier, Tech Serve Solutions professionally packs, ships, and exports chemicals worldwide in compliance with international regulations for hazardous materials.
How can I request a sample or quote for 2,4,6,8,10-Pentamethylcyclopentasiloxane?
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To request a sample or a quote, please contact the Tech Serve Solutions sales team via our website or by phone, providing the product name and CAS number (6166-86-5).
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