1,1,2,2-Tetramethyldisilane
1,1,2,2-Tetramethyldisilane (CAS 814-98-2) is an organosilicon compound with the formula (CH3)2SiHSiH(CH3)2 and a molecular weight of 118.32 g/mol. This flammable liquid is utilised as a precursor in materials science and microelectronics, particularly in chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes for thin film applications. It also serves as a reagent in chemical synthesis.
- Synonyms
- 2-Tetramethyldisilane814-98-2(CH3)2SiHSiH(CH3)2

CVD and ALD Precursor
1,1,2,2-Tetramethyldisilane serves as a key precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for creating thin films in microelectronic devices and advanced materials.
Chemical Synthesis
This organosilicon compound acts as a valuable reagent in various chemical synthesis pathways, enabling the introduction of specific silicon-containing functionalities.
Materials Science
Its properties make it suitable for applications in materials science, contributing to the development of novel materials with tailored characteristics.
Microelectronics
As a precursor for deposition techniques, it plays a role in the fabrication of microelectronic components and devices.
| Molecular weight | 118.32 |
|---|---|
| Linear formula | (CH3)2SiHSiH(CH3)2 |
| Assay | 98% |
| Boiling point | 86-87 °C(lit.) |
| Density | 0.715 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.428(lit.) |
| Storage temperature | −20°C |

Hazard statements
- H225Highly flammable liquid and vapour
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | -26 °C / -14.8 °F |
| Transport (UN / ADR) | UN 1993BE 3 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F |
| Risk statements (R) | 11 |
| Safety statements (S) | 16-29-33 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is 1,1,2,2-Tetramethyldisilane used for?
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1,1,2,2-Tetramethyldisilane is used as a precursor in CVD and ALD for thin film deposition in microelectronics and materials science, and as a reagent in chemical synthesis.
What is the CAS number and formula for 1,1,2,2-Tetramethyldisilane?
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The CAS number is 814-98-2, and its linear formula is (CH3)2SiHSiH(CH3)2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies 1,1,2,2-Tetramethyldisilane with an assay of 98%. This product is not represented as USP, BP, or EP grade.
How is 1,1,2,2-Tetramethyldisilane handled and stored?
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1,1,2,2-Tetramethyldisilane is a highly flammable liquid (H225) and requires storage at -20°C away from ignition sources. Handling necessitates appropriate personal protective equipment, including eyeshields, gloves, and suitable respiratory protection.
How is 1,1,2,2-Tetramethyldisilane packed and shipped?
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This product is packed and shipped according to relevant transportation regulations, including UN 1993 classification for flammable liquids.
How can I request a quote or sample for 1,1,2,2-Tetramethyldisilane?
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To request a quote or sample, please contact our sales team via the website or direct inquiry, providing your specific requirements.
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