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1,1,2,2-Tetramethyldisilane

CAS 814-98-2(CH3)2SiHSiH(CH3)2Chemical Synthesis

1,1,2,2-Tetramethyldisilane (CAS 814-98-2) is an organosilicon compound with the formula (CH3)2SiHSiH(CH3)2 and a molecular weight of 118.32 g/mol. This flammable liquid is utilised as a precursor in materials science and microelectronics, particularly in chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes for thin film applications. It also serves as a reagent in chemical synthesis.

Synonyms
2-Tetramethyldisilane814-98-2(CH3)2SiHSiH(CH3)2
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1,1,2,2-Tetramethyldisilane ((CH3)2SiHSiH(CH3)2) — chemical structure, CAS 814-98-2; Chemistry, fine chemical supplied by Tech Serve Solutions
Chemical SynthesisDisilanesMaterials ScienceMicro/NanoElectronicsOrganometallic ReagentsOrganosiliconSilicon
01 /Applications

CVD and ALD Precursor

1,1,2,2-Tetramethyldisilane serves as a key precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for creating thin films in microelectronic devices and advanced materials.

Chemical Synthesis

This organosilicon compound acts as a valuable reagent in various chemical synthesis pathways, enabling the introduction of specific silicon-containing functionalities.

Materials Science

Its properties make it suitable for applications in materials science, contributing to the development of novel materials with tailored characteristics.

Microelectronics

As a precursor for deposition techniques, it plays a role in the fabrication of microelectronic components and devices.

02 /Properties
Molecular weight118.32
Linear formula(CH3)2SiHSiH(CH3)2
Assay98%
Boiling point86-87 °C(lit.)
Density0.715 g/mL at 25 °C(lit.)
Refractive indexn20/D 1.428(lit.)
Storage temperature−20°C
03 /Safety & handling
GHS hazard pictogram: Flammable (GHS02)
Flammable
Danger

Hazard statements

  • H225Highly flammable liquid and vapour

Precautionary statements

  • P210Keep away from heat, sparks and open flames. No smoking
Protective equipmentEyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
Flash point-26 °C / -14.8 °F
Transport (UN / ADR)UN 1993BE 3 / PGII
Water hazard class (WGK, DE)3
Hazard codes (EU)F
Risk statements (R)11
Safety statements (S)16-29-33

Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.

04 /Identifiers & registry
CAS number
814-98-2
MDL number
MFCD00274234
PubChem substance
24868160
Beilstein registry
1900247
05 /Quality & supply

Documentation

Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.

Supply & logistics

Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.

06 /Frequently asked questions

What is 1,1,2,2-Tetramethyldisilane used for?

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1,1,2,2-Tetramethyldisilane is used as a precursor in CVD and ALD for thin film deposition in microelectronics and materials science, and as a reagent in chemical synthesis.

What is the CAS number and formula for 1,1,2,2-Tetramethyldisilane?

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The CAS number is 814-98-2, and its linear formula is (CH3)2SiHSiH(CH3)2.

What grade and purity does Tech Serve Solutions supply?

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Tech Serve Solutions supplies 1,1,2,2-Tetramethyldisilane with an assay of 98%. This product is not represented as USP, BP, or EP grade.

How is 1,1,2,2-Tetramethyldisilane handled and stored?

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1,1,2,2-Tetramethyldisilane is a highly flammable liquid (H225) and requires storage at -20°C away from ignition sources. Handling necessitates appropriate personal protective equipment, including eyeshields, gloves, and suitable respiratory protection.

How is 1,1,2,2-Tetramethyldisilane packed and shipped?

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This product is packed and shipped according to relevant transportation regulations, including UN 1993 classification for flammable liquids.

How can I request a quote or sample for 1,1,2,2-Tetramethyldisilane?

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To request a quote or sample, please contact our sales team via the website or direct inquiry, providing your specific requirements.

Need 1,1,2,2-Tetramethyldisilane in a specific grade or volume?