Tungsten hexacarbonyl
Tungsten hexacarbonyl (CAS: 14040-11-0; Formula: W(CO)6; MW: 351.90) is a white crystalline solid. This compound serves as a valuable precursor in materials science, particularly for the chemical vapour deposition (CVD) and atomic layer deposition (ALD) of tungsten-containing thin films. It is also utilised in photochemistry and as a building block in inorganic synthesis and catalysis.

CVD and ALD Precursor
Tungsten hexacarbonyl is a key precursor for depositing tungsten and tungsten-containing films via Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) processes. These films are critical in microelectronics and semiconductor manufacturing.
Materials Science
It is employed in the synthesis of novel tungsten-based nanomaterials and complex structures. Its controlled decomposition allows for precise material fabrication at the nanoscale.
Photochemistry
This compound finds applications in photochemical research due to its unique electronic and photophysical properties. It can participate in light-induced reactions and energy transfer processes.
Catalysis and Inorganic Synthesis
Tungsten hexacarbonyl serves as a starting material for preparing various tungsten complexes and organometallic compounds used in homogeneous and heterogeneous catalysis. It is a useful reagent in inorganic chemistry.
| Molecular weight | 351.90 |
|---|---|
| Linear formula | W(CO)6 |
| Assay | 99.99% trace metals basis (excluding Mo) |
| Form | solid |
| Density | 2.65 g/mL at 25 °C(lit.) |
| Vapour pressure | 1.2 mmHg (67 °C) |
| Vapour density | 12.1 (vs air) |
| Melting point | 150 °C(lit.) |
| Application | A precursor for the perparation of tungsten-containing complexes or nanomaterials. Also used in photochemistry |

Hazard statements
- H301Toxic if swallowed
Precautionary statements
- P261Avoid breathing dust, fume, gas or vapours
- P280Wear protective gloves, clothing and eye/face protection
- P301IF SWALLOWED
- P311Call a POISON CENTER or doctor
| Protective equipment | Eyeshields, Gloves, type N95 (US), type P1 (EN143) respirator filter |
|---|---|
| Transport (UN / ADR) | UN 3466 6.1 / PGIII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | T |
| Risk statements (R) | 23/24/25 |
| Safety statements (S) | 36/37-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Purified By | sublimation |
|---|
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tungsten hexacarbonyl used for?
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Tungsten hexacarbonyl (CAS: 14040-11-0) is primarily used as a precursor in CVD and ALD for depositing tungsten-containing films, in materials science for nanomaterial synthesis, in photochemistry, and as a starting material for various tungsten complexes in catalysis and inorganic synthesis.
What is the CAS number and chemical formula for Tungsten hexacarbonyl?
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The CAS number for Tungsten hexacarbonyl is 14040-11-0, and its chemical formula is W(CO)6.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Tungsten hexacarbonyl with an assay of 99.99% trace metals basis (excluding Mo), purified by sublimation. TSS does not represent this product as USP, BP, EP, or other pharmacopoeia grades.
What are the primary hazards associated with Tungsten hexacarbonyl?
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Tungsten hexacarbonyl is acutely toxic if swallowed, in contact with skin, or if inhaled (H301 + H311 + H331). Appropriate personal protective equipment, including eyeshields, gloves, and respiratory protection (type N95 or P1 respirator filter), is essential when handling this substance. It requires careful handling in a well-ventilated area.
How is Tungsten hexacarbonyl packed, shipped, and exported?
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Tungsten hexacarbonyl is packed according to relevant safety and transport regulations (UN 3466 6.1 / PGIII). TSS specialises in global export and can provide details on shipping and handling upon request.
How can I request a quote or sample for Tungsten hexacarbonyl?
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To request a quote or a sample of Tungsten hexacarbonyl, please contact the TSS sales team via our website or direct inquiry, providing your contact details and the quantity required.
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