Tris(diethylamido)(tert-butylimido)tantalum(V)
Tris(diethylamido)(tert-butylimido)tantalum(V), CAS 169896-41-7, is a liquid organometallic compound with the linear formula (CH3)3CNTa(N(C2H5)2)3 and a molecular weight of 468.46 g/mol. Supplied by Tech Serve Solutions as a HITECH grade with an assay of ≥99.99% trace metals basis, this tantalum precursor is primarily utilised in advanced materials science and microelectronics for Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) processes.
- IUPAC
- TBTDET,Tris(diethylamino)(tert-butylimino)tantalum(V)
Chemical Vapour Deposition (CVD)
This tantalum compound serves as a high-purity precursor for depositing thin films in microelectronic fabrication. Its controlled decomposition allows for precise layer growth critical in semiconductor manufacturing.
Atomic Layer Deposition (ALD)
Utilised in ALD processes, it enables the sequential deposition of conformal thin films with atomic-level control. This is essential for advanced gate dielectrics and barrier layers in microelectronic devices.
Materials Science
Applied in materials research for the synthesis of novel tantalum-containing materials and thin films with tailored electronic and optical properties.
Inorganic Synthesis
Serves as a versatile reagent in inorganic chemistry for the synthesis of complex tantalum-based compounds and catalysts.
| Molecular weight | 468.46 |
|---|---|
| Linear formula | (CH3)3CNTa(N(C2H5)2)3 |
| Assay | ≥99.99% trace metals basis99% |
| Form | liquid |
| Density | 1.252 g/mL at 25 °C(lit.) |
Hazard statements
- H226Flammable liquid and vapour
- H261In contact with water releases flammable gas
- H314Causes severe skin burns and eye damage
Precautionary statements
- P231Handle under inert gas
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
- P422
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 46 °C / 114.8 °F |
| Transport (UN / ADR) | UN 3398 4.3/PG 2 |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 10-14/15-34 |
| Safety statements (S) | 26-36/37/39-43-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Quality Level | HITECH |
|---|
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Tris(diethylamido)(tert-butylimido)tantalum(V) used for?
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Tris(diethylamido)(tert-butylimido)tantalum(V) is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for applications in microelectronics and materials science.
What are the CAS number and formula for Tris(diethylamido)(tert-butylimido)tantalum(V)?
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The CAS number is 169896-41-7 and the linear formula is (CH3)3CNTa(N(C2H5)2)3.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies this compound as a HITECH grade with an assay of ≥99.99% trace metals basis. We do not represent this product as USP, BP, or EP grade.
How should Tris(diethylamido)(tert-butylimido)tantalum(V) be handled safely?
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This substance is highly flammable and reacts violently with water. Handle with extreme caution in a well-ventilated area, away from ignition sources, and use appropriate personal protective equipment including face shield, goggles, and chemical-resistant gloves. Refer to the Safety Data Sheet (SDS) for detailed handling instructions.
How is Tris(diethylamido)(tert-butylimido)tantalum(V) packed and shipped?
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The product is packed in accordance with UN 3398, Hazard Class 4.3, Packing Group II regulations for hazardous materials and is exported globally by Tech Serve Solutions.
How can I request a quote or sample?
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To request a quote or sample, please contact our sales team via the website or by phone, providing the product name and CAS number (169896-41-7).
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