Tris(diethylamido)(ethylimido)tantalum(V)

CAS 67313-80-8C2H5NTa(N(C2H5)2)3Catalysis & Inorganic

Tris(diethylamido)(ethylimido)tantalum(V), CAS 67313-80-8, with the formula C2H5NTa(N(C2H5)2)3 and a molecular weight of 440.40 g/mol, is a specialised organometallic compound. It is primarily utilised as a precursor in advanced material deposition techniques, particularly for chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes. Its specific chemical structure makes it valuable for depositing thin films containing tantalum.

IUPAC: Tris(diethylamino)(ethylimino)tantalum(V)

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Tris(diethylamido)(ethylimido)tantalum(V) (C2H5NTa(N(C2H5)2)3) — chemical structure, CAS 67313-80-8; Chemistry, fine chemical supplied by Tech Serve Solutions

Chemical SynthesisMaterials ScienceMicro/NanoElectronicsTantalum

01 /Applications

Chemical Vapour Deposition (CVD)

This compound serves as a precursor in CVD processes for depositing thin films of tantalum-containing materials. Its volatility and decomposition characteristics are critical for achieving uniform and high-quality film growth on substrates.

Atomic Layer Deposition (ALD)

It is employed in ALD to deposit conformal and precisely controlled thin films. The sequential and self-limiting reactions in ALD enable the growth of ultra-thin layers essential for microelectronics and advanced coatings.

Materials Science Research

Researchers utilise this organotantalum compound in the development of novel materials with specific electronic, optical, or structural properties. Its unique chemistry allows for the exploration of new material compositions.

Catalysis and Inorganic Chemistry

The compound may find applications in specialised catalytic processes or as a building block in inorganic synthesis due to the presence of tantalum and its reactive ligands.

02 /Properties

Molecular weight	440.40
Linear formula	C2H5NTa(N(C2H5)2)3
Assay	99.99% trace metals basis
Density	1.31 g/mL at 25 °C(lit.)
Refractive index	n20/D 1.51(lit.)

03 /Safety & handling

GHS hazard pictogram: Flammable (GHS02) — Flammable

GHS hazard pictogram: Corrosive (GHS05) — Corrosive

Danger

Hazard statements

H225Highly flammable liquid and vapour
H314Causes severe skin burns and eye damage

Precautionary statements

P210Keep away from heat, sparks and open flames. No smoking
P280Wear protective gloves, clothing and eye/face protection
P305IF IN EYES
P310Immediately call a POISON CENTER or doctor

Protective equipment	Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
Flash point	2 °C / 35.6 °F
Transport (UN / ADR)	UN 2924 8(3) / PGII
Water hazard class (WGK, DE)	3
Hazard codes (EU)	F
Risk statements (R)	11-34
Safety statements (S)	16-26-27-36/37/39

Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.

04 /Identifiers & registry

CAS number

67313-80-8

MDL number

MFCD03093879

05 /Quality & supply

Documentation

Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.

Supply & logistics

Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.

06 /Frequently asked questions

What is Tris(diethylamido)(ethylimido)tantalum(V) used for?

Tris(diethylamido)(ethylimido)tantalum(V) is primarily used as a precursor in chemical vapour deposition (CVD) and atomic layer deposition (ALD) for depositing tantalum-containing thin films, and in materials science research.

What is the CAS number and formula for Tris(diethylamido)(ethylimido)tantalum(V)?

The CAS number is 67313-80-8, and the chemical formula is C2H5NTa(N(C2H5)2)3.

What grade and purity does Tech Serve Solutions supply?

Tech Serve Solutions supplies this product with an assay of 99.99% trace metals basis. We do not represent this product as USP, BP, EP, or other pharmacopoeia grades.

What are the main hazards associated with this compound?

This compound is highly flammable (H225) and causes severe skin burns and eye damage (H314). It requires careful handling in a well-ventilated area, away from ignition sources, using appropriate personal protective equipment.

How is Tris(diethylamido)(ethylimido)tantalum(V) typically packed and shipped?

It is typically packed and shipped according to UN 2924 regulations for corrosive and flammable liquids, in appropriate packaging (PGII) suitable for international export.