Sodium hexafluoroacetylacetonate
Sodium hexafluoroacetylacetonate (CAS: 22466-49-5, Formula: NaC5HF6O2, MW: 230.04) is a chemical compound utilised as a precursor in materials science and micro/nanoelectronics. It plays a role in the synthesis of various metal-containing compounds, including catalytic complexes and chemical vapour deposition (CVD) precursors. Supplied by Tech Serve Solutions with an assay of 97%, it is a key reagent for advanced chemical research and development.

Chromium β-diketonate Synthesis
This compound has been employed in the solid-phase synthesis of chromium β-diketonates, contributing to the development of novel inorganic materials.
Ruthenium Complex Preparation
It serves as a reagent in the preparation of catalytic ruthenium diphosphine complexes, valuable for various homogeneous catalysis applications.
Copper CVD Precursor Development
Sodium hexafluoroacetylacetonate is used in the preparation of new copper chemical vapour deposition (CVD) precursors, essential for microelectronic fabrication processes.
| Molecular weight | 230.04 |
|---|---|
| Linear formula | NaC5HF6O2 |
| Assay | 97% |
| Application | Recently employed in the solid-phase synthesis of chromium β-diketonates,1 in the preparation of novel catalytic ruthenium diphosphine complexes2 and in the preparation of a series of new copper chemical vapor deposition (CVD) precursors.3 |

Hazard statements
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
| Protective equipment | dust mask type N95 (US), Eyeshields, Gloves |
|---|---|
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | Xi |
| Risk statements (R) | 36/37/38 |
| Safety statements (S) | 26-36 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Sodium hexafluoroacetylacetonate used for?
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Sodium hexafluoroacetylacetonate is used in the solid-phase synthesis of chromium β-diketonates, the preparation of catalytic ruthenium diphosphine complexes, and in the development of copper chemical vapour deposition (CVD) precursors.
What are the CAS number and formula for Sodium hexafluoroacetylacetonate?
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The CAS number is 22466-49-5 and the chemical formula is NaC5HF6O2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Sodium hexafluoroacetylacetonate with an assay of 97%. This is a technical or research grade material, and TSS does not represent it as USP, BP, or EP grade.
How should Sodium hexafluoroacetylacetonate be handled?
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Warning: This compound can cause skin irritation (H315), serious eye irritation (H319), and may cause respiratory irritation (H335). Wear a dust mask type N95 (US), eyeshields, and gloves. Ensure adequate ventilation.
Can I request a sample or quote for Sodium hexafluoroacetylacetonate?
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Yes, please contact our sales team to request a sample or obtain a quote for Sodium hexafluoroacetylacetonate.
How is Sodium hexafluoroacetylacetonate packed and shipped?
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Sodium hexafluoroacetylacetonate is carefully packed according to international shipping regulations for chemical compounds and is available for export worldwide.
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