Silicon tetraiodide
Silicon tetraiodide (SiI4, CAS 13465-84-4) is a volatile organosilicon compound with a molecular weight of 535.70 g/mol. It appears as a colourless crystalline solid that melts at 120.5 °C and boils at 287.4 °C. This high-purity material is primarily employed as a precursor in chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes for microelectronics and materials science applications.

Semiconductor Manufacturing
Used as a silicon source in CVD and ALD for depositing thin silicon films and silicon-containing layers in microelectronic device fabrication.
Materials Science
Serves as a precursor for synthesising novel silicon-based materials and coatings with specific electronic or optical properties.
Research and Development
Utilised in laboratories for fundamental research into silicon chemistry and materials deposition techniques.
| Molecular weight | 535.70 |
|---|---|
| Linear formula | SiI4 |
| Assay | ≥99.9% trace metals basis |
| Boiling point | 287.4 °C(lit.) |
| Density | 4.198 g/mL at 25 °C(lit.) |
| Melting point | 120.5 °C(lit.) |



Hazard statements
- H301Toxic if swallowed
- H311Toxic in contact with skin
- H314Causes severe skin burns and eye damage
- H317May cause an allergic skin reaction
- H334May cause allergy or asthma symptoms if inhaled
- H360May damage fertility or the unborn child
Precautionary statements
- P201Obtain special instructions before use
- P261Avoid breathing dust, fume, gas or vapours
- P280Wear protective gloves, clothing and eye/face protection
- P301IF SWALLOWED
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P2 (EN 143) respirator cartridges, type P3 (EN 143) respirator cartridges |
|---|---|
| Transport (UN / ADR) | UN 3260 8 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | T |
| Risk statements (R) | 61-24/25-34-42/43 |
| Safety statements (S) | 53-26-36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Silicon tetraiodide used for?
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Silicon tetraiodide is primarily used as a precursor in chemical vapour deposition (CVD) and atomic layer deposition (ALD) for semiconductor manufacturing and materials science research.
What are the CAS number and chemical formula for Silicon tetraiodide?
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The CAS number is 13465-84-4 and the chemical formula is SiI4.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Silicon tetraiodide with a minimum purity of ≥99.9% on a trace metals basis. This product is not represented as USP, BP, or EP grade.
How should Silicon tetraiodide be handled safely?
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Silicon tetraiodide is corrosive and toxic, causing severe skin burns and eye damage, and may cause respiratory irritation. Handle with appropriate personal protective equipment, including eyeshields, face shields, and chemical-resistant gloves, in a well-ventilated area or fume hood.
How is Silicon tetraiodide packed and shipped?
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Silicon tetraiodide is shipped as a UN 3260, Class 8, Packing Group II hazardous material.
How can I request a quote or sample?
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Please contact our sales team via phone or email to request a quote or a sample of Silicon tetraiodide.
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