Silicon tetrabromide
Silicon tetrabromide (CAS 7789-66-4), with the molecular formula SiBr₄ and a molecular weight of 347.70 g/mol, is a chemical compound typically supplied at 99% purity. It is primarily recognised for its role as a precursor in materials science, particularly in microelectronics and vapor deposition processes. This compound serves as a vital component in the synthesis of various silicon-based materials through Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) techniques.
- IUPAC
- Tetrabromosilane
- Synonyms
- Tetrabromosilane

CVD and ALD Precursor
Silicon tetrabromide is a key precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) processes. It is used to deposit silicon-containing thin films essential for microelectronics and semiconductor fabrication.
Materials Science
This compound finds application in materials science for the synthesis of novel silicon-based materials. Its controlled decomposition allows for precise material composition and structure.
Microelectronics
In the microelectronics industry, SiBr₄ serves as a source material for creating critical components. It facilitates the deposition of high-purity silicon layers required for advanced electronic devices.
Vapor Deposition
As a vapor deposition precursor, silicon tetrabromide enables the controlled growth of thin films and nanostructures. This is crucial for research and development in nanotechnology and advanced materials.
| Molecular weight | 347.70 |
|---|---|
| Linear formula | SiBr4 |
| Assay | 99% |
| Boiling point | 153 °C(lit.) |
| Density | 2.8 g/mL at 25 °C(lit.) |
| Vapour density | 2.8 (vs air) |
| Melting point | 5 °C(lit.) |

Hazard statements
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Transport (UN / ADR) | UN 3264 8 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 34 |
| Safety statements (S) | 26-27-28-36/37/39 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Silicon Tetrabromide used for?
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Silicon tetrabromide (CAS 7789-66-4) is primarily used as a precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) for creating silicon-containing thin films in microelectronics and materials science.
What are the CAS number and formula for Silicon Tetrabromide?
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The CAS number for Silicon Tetrabromide is 7789-66-4, and its linear formula is SiBr₄.
What grade and purity does Tech Serve Solutions supply for Silicon Tetrabromide?
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Tech Serve Solutions supplies Silicon Tetrabromide with an assay of 99%. We do not represent this product as USP, BP, EP, or any other pharmacopoeia grade.
How should Silicon Tetrabromide be handled safely?
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Silicon Tetrabromide is corrosive and causes severe skin burns and eye damage (H314). Handle with appropriate personal protective equipment, including face shields, gloves, and suitable respiratory protection. Ensure adequate ventilation and refer to the safety data sheet for detailed handling procedures.
How is Silicon Tetrabromide packed and shipped?
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Silicon Tetrabromide is packed and shipped in compliance with UN 3264 8 / PGII regulations for corrosive materials, ensuring safe transport and export.
How can I request a quote or sample of Silicon Tetrabromide?
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To request a quote or sample of Silicon Tetrabromide, please contact our sales team through the website or by phone, providing your specific requirements.
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