Molybdenum(VI) fluoride
Molybdenum(VI) fluoride (MoF6), CAS 7783-77-9, is a high-purity inorganic compound with a molecular weight of 209.93 g/mol. This volatile compound, a colourless liquid at room temperature, is primarily utilised in specialised chemical synthesis, as a precursor in materials science, and in the electronics industry. Its high reactivity makes it suitable for advanced applications requiring precise chemical control.
- IUPAC
- Hexafluoromolybdenum,Molybdenum hexafluoride

Chemical Synthesis
Molybdenum(VI) fluoride serves as a versatile reagent in various chemical synthesis pathways. It is employed in reactions where a source of molybdenum or a strong fluorinating agent is required.
Materials Science
This compound is a precursor for the synthesis of advanced materials and thin films. Its properties are leveraged in developing novel materials with specific electronic or optical characteristics.
Electronics Industry
MoF6 is applied in the microelectronics sector for processes such as chemical vapour deposition (CVD). It can be used to deposit thin films of molybdenum or molybdenum compounds onto semiconductor substrates.
Specialty Gas Applications
As a volatile fluoride, Molybdenum(VI) fluoride can be utilised in certain specialty gas applications. Its controlled use allows for precise introduction of molybdenum into industrial processes.
| Molecular weight | 209.93 |
|---|---|
| Linear formula | MoF6 |
| Assay | ≥99.9% |
| Boiling point | 37 °C(lit.) |
| Density | 2.3 g/mL at 25 °C(lit.) |
| Melting point | 17.5 °C(lit.) |

Hazard statements
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 3264 8 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 34 |
| Safety statements (S) | 26-36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Molybdenum(VI) fluoride used for?
+
Molybdenum(VI) fluoride is used in chemical synthesis, as a precursor in materials science, and in the electronics industry for applications such as chemical vapour deposition.
What are the CAS number and formula for Molybdenum(VI) fluoride?
+
The CAS number for Molybdenum(VI) fluoride is 7783-77-9, and its chemical formula is MoF6.
What grade and purity does Tech Serve Solutions supply?
+
Tech Serve Solutions supplies Molybdenum(VI) fluoride with an assay of ≥99.9%. We do not represent this product as USP, BP, EP, or any other pharmacopoeia grade unless explicitly stated in the product specifications.
How should Molybdenum(VI) fluoride be handled safely?
+
Molybdenum(VI) fluoride is corrosive and can cause severe skin burns and eye damage (H314). Handle with extreme care, using appropriate personal protective equipment including faceshields, gloves, and goggles in a well-ventilated area or fume hood. Refer to the Safety Data Sheet for detailed handling procedures.
How is Molybdenum(VI) fluoride packed, shipped, and exported?
+
Molybdenum(VI) fluoride is packed and shipped in compliance with international regulations for hazardous materials, typically as UN 3264, Class 8, Packing Group II. Tech Serve Solutions has extensive experience in exporting chemicals globally.
How can I request a quote or sample for Molybdenum(VI) fluoride?
+
To request a quote or a sample of Molybdenum(VI) fluoride, please contact our sales team through the website or by phone, providing your contact details and the quantity required.
▶ Related products

(11-Mercaptoundecyl)-N,N,N-trimethylammonium bromide
Micro / NanoElectronics

(11-Mercaptoundecyl)hexa(ethylene glycol)
C23H48O7S
Micro / NanoElectronics
(12-Phosphonododecyl)phosphonic acid
C12H28O6P2
Micro / NanoElectronics
(2,2,3,3,4,4,5,5,6,6,7,7,7-Tridecafluoroheptyl)oxirane
C9H5F13O
Micro / NanoElectronics
(2,2,3,3,4,4,5,5,6,6,7,7,8,8,9,9,9-Heptadecafluorononyl)oxirane
C11H5F17O
Micro / NanoElectronics
(3-Chloropropyl)dimethoxymethylsilane
Cl(CH2)3Si(OCH3)2CH3
Micro / NanoElectronics
(3-Chloropropyl)trimethoxysilane
Cl(CH2)3Si(OCH3)3
Micro / NanoElectronics
(4-Bromophenyl)diphenylsulfonium triflate
C19H14BrF3O3S2
Micro / NanoElectronics▶ Explore more

3-Methyl-1,5-di-p-tolyl-1,4-pentazadiene
Chemical Synthesis

3-Methyl-1,5-pentanediol
Chemical Synthesis

3-Methyl-1-(2-methylphenyl)-1H-pyrazol-5-amine
C11H13N3
Chemical Synthesis
3-Methyl-1-(3′-sulfoamidophenyl)-5-pyrazolone
C10H11N3O3S
Chemical Synthesis