Methyltrichlorosilane
Methyltrichlorosilane (CAS: 75-79-6), with the linear formula CH₃SiCl₃ and a molecular weight of 149.48 g/mol, is a highly reactive, colourless liquid. It serves as a crucial intermediate in chemical synthesis and a precursor in materials science, particularly for silicon-based materials and nanostructures. Its primary applications lie in the production of silsesquioxanes, surface modification, and as a building block in microelectronics fabrication.
- IUPAC
- Trichloro(methyl)silane
- Synonyms
- Trichloro(methyl)silaneMethylsilicon trichlorideTrichloromethylsilane

Precursor for Silsesquioxanes and POSS Nanomaterials
Methyltrichlorosilane is a key starting material for the synthesis of polyhedral oligomeric silsesquioxanes (POSS) and other silicon-based nanohybrids. These materials find applications in advanced polymers, coatings, and nanocomposites.
Surface Modification Agent
It is utilized for the functionalization of surfaces, imparting specific properties such as hydrophobicity or adhesion. This is particularly relevant in the development of advanced materials and in micro/nanoelectronics fabrication.
Intermediate in Organic Synthesis
As a reactive organosilicon compound, methyltrichlorosilane acts as a methylating agent and a building block in various organic and inorganic synthesis pathways. It is employed in the production of specialized silicon-containing compounds.
Silane Coupling Agent Component
This compound contributes to the formulation of silane coupling agents, which are used to promote adhesion between inorganic substrates and organic polymers. This enhances the performance and durability of composite materials.
| Molecular weight | 149.48 |
|---|---|
| Linear formula | CH3SiCl3 |
| Assay | 99% |
| Form | liquid |
| Boiling point | 66 °C(lit.) |
| Density | 1.273 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.411(lit.) |
| Vapour pressure | 150 mmHg (25 °C) |
| Vapour density | 5.2 (vs air) |
| Autoignition temp | >760 °F |


Hazard statements
- H225Highly flammable liquid and vapour
- H315Causes skin irritation
- H319Causes serious eye irritation
- H335May cause respiratory irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P261Avoid breathing dust, fume, gas or vapours
- P305IF IN EYES
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 8 °C / 46.4 °F |
| Transport (UN / ADR) | UN 1250 8(3) / PGI |
| Water hazard class (WGK, DE) | 1 |
| Hazard codes (EU) | F,Xi |
| Risk statements (R) | 11-14-36/37/38 |
| Safety statements (S) | 26-39 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
| Expl Lim | 11.9 % |
|---|
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Methyltrichlorosilane used for?
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Methyltrichlorosilane is primarily used as a precursor for silsesquioxanes and POSS nanomaterials, for surface modification, as an intermediate in organic synthesis, and in the formulation of silane coupling agents for materials science and microelectronics applications.
What is the CAS number and formula for Methyltrichlorosilane?
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The CAS number is 75-79-6 and the linear formula is CH₃SiCl₃.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Methyltrichlorosilane with an assay of 99%. We do not represent this product as USP, BP, or EP grade.
How should Methyltrichlorosilane be handled safely?
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Methyltrichlorosilane is a flammable liquid that reacts violently with water, is irritating to the eyes, skin, and respiratory tract. Handle in a well-ventilated area, away from ignition sources, and use appropriate personal protective equipment including gloves, goggles, and a respirator. Avoid contact with water and moisture.
How is Methyltrichlorosilane packed and shipped?
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Methyltrichlorosilane is shipped as a flammable liquid, UN 1250, Class 8 (3), Packing Group I. Packaging complies with international regulations for hazardous materials.
How can I request a quote or sample for Methyltrichlorosilane?
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Please contact our sales team via the website or by phone to request a quote or a sample of Methyltrichlorosilane.
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