Methoxytrimethylsilane
Methoxytrimethylsilane (CAS: 1825-61-2), with the chemical formula CH3OSi(CH3)3 and a molar mass of 104.22 g/mol, is a volatile, clear liquid. This mono-alkoxy silane is primarily utilized in materials science and micro/nanoelectronics. Its properties make it suitable for applications in self-assembly techniques and as a precursor in various chemical syntheses, offering controlled modification of surfaces and materials.
- IUPAC
- Methyl trimethylsilyl ether,Trimethylmethoxysilane

Surface Modification
Methoxytrimethylsilane can be employed to modify the surface properties of materials, particularly in the field of microelectronics. It is used to create hydrophobic or functionalized surfaces through self-assembly techniques.
Materials Science Precursor
As a silane derivative, it serves as a building block or precursor in the synthesis of advanced materials. Its controlled reactivity allows for precise incorporation into polymer structures or inorganic frameworks.
Microelectronics Fabrication
In micro and nanoelectronics, Methoxytrimethylsilane finds application in processes requiring controlled surface functionalization. This can include preparation for photolithography or creating specific interfaces in semiconductor devices.
Self-Assembly Applications
The compound is relevant in studies and applications involving self-assembly, particularly for creating ordered monolayers on various substrates. This aids in fabricating functional nanostructures and devices.
| Molecular weight | 104.22 |
|---|---|
| Linear formula | CH3OSi(CH3)3 |
| Assay | 99% |
| Form | liquid |
| Boiling point | 57-58 °C(lit.) |
| Density | 0.756 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.366(lit.) |


Hazard statements
- H225Highly flammable liquid and vapour
- H319Causes serious eye irritation
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P305IF IN EYES
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US) |
|---|---|
| Flash point | -20 °C / -4 °F |
| Transport (UN / ADR) | UN 1993BF 3 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,Xi |
| Risk statements (R) | 11-36 |
| Safety statements (S) | 16-26 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Methoxytrimethylsilane used for?
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Methoxytrimethylsilane is used in materials science and micro/nanoelectronics for surface modification, as a precursor in material synthesis, and in self-assembly techniques to create functional surfaces.
What are the CAS number and formula for Methoxytrimethylsilane?
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The CAS number for Methoxytrimethylsilane is 1825-61-2, and its chemical formula is CH3OSi(CH3)3.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Methoxytrimethylsilane with an assay of 99%. This product is a research or technical grade and is not represented as USP, BP, or EP grade.
How should Methoxytrimethylsilane be handled safely?
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Methoxytrimethylsilane is a highly flammable liquid and vapour that causes serious eye irritation. Handle with appropriate personal protective equipment, including eyeshields and gloves, in a well-ventilated area, away from ignition sources.
How is Methoxytrimethylsilane packed and shipped?
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Methoxytrimethylsilane is shipped as a flammable liquid, UN 1993, UN Packing Group II, adhering to strict regulations for safe transport.
How can I request a quote or sample?
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To request a quote or sample of Methoxytrimethylsilane, please contact our sales team through the website or by phone, providing your specific requirements.
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