Chloromethyltrimethoxysilane
Chloromethyltrimethoxysilane (CAS 5926-26-1) is a silane compound with the molecular formula (H3CO)3SiCH2Cl and a molecular weight of 170.67. This organosilicon chemical serves as a versatile intermediate and reagent. Its primary applications lie in materials science, particularly in micro/nanoelectronics and self-assembly processes, where it is used for surface modification and the creation of functionalised materials. It is supplied by TSS with an assay of 96%.

Surface Modification
Chloromethyltrimethoxysilane is employed to introduce functional groups onto surfaces, altering their chemical and physical properties. This is crucial for tailoring material interfaces in advanced applications.
Micro/Nanoelectronics
This silane is utilised in the fabrication of microelectronic devices and nanostructures. It can act as a cross-linking agent or a precursor for depositing thin films with specific characteristics.
Self-Assembly Materials
The compound facilitates the formation of ordered molecular layers through self-assembly techniques. This is valuable in creating complex structures and functional surfaces for various technological uses.
Chemical Synthesis
As a reactive intermediate, Chloromethyltrimethoxysilane can be used in organic synthesis to incorporate silicon-containing moieties or the chloromethyl group into larger molecules.
| Molecular weight | 170.67 |
|---|---|
| Linear formula | (H3CO)3SiCH2Cl |
| Assay | 96% |
| Boiling point | 151 °C(lit.) |
| Density | 1.132 g/mL at 25 °C(lit.) |

Hazard statements
- H225Highly flammable liquid and vapour
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
| Protective equipment | Eyeshields, Faceshields, full-face respirator (US), Gloves, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | -3 °C / 26.6 °F |
| Transport (UN / ADR) | UN 1993BE 3 / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F |
| Risk statements (R) | 11 |
| Safety statements (S) | 16-29-33 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Chloromethyltrimethoxysilane used for?
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Chloromethyltrimethoxysilane is used in materials science, micro/nanoelectronics, and self-assembly processes for surface modification and the synthesis of functionalised materials.
What is the CAS number and formula for Chloromethyltrimethoxysilane?
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The CAS number is 5926-26-1 and the linear formula is (H3CO)3SiCH2Cl.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies Chloromethyltrimethoxysilane with an assay of 96%. This is a technical grade for research and industrial use, and we do not represent it as USP, BP, or EP.
How should Chloromethyltrimethoxysilane be handled safely?
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Chloromethyltrimethoxysilane is a flammable liquid and vapour (H225) requiring strict safety protocols. Handle in a well-ventilated area, away from ignition sources. Essential personal protective equipment includes eyeshields, gloves, and appropriate respiratory protection such as a full-face respirator with an ABEK filter.
Is Chloromethyltrimethoxysilane flammable?
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Yes, Chloromethyltrimethoxysilane is a highly flammable liquid and vapour, indicated by hazard statement H225 and a flash point of -3 °C (26.6 °F).
How is Chloromethyltrimethoxysilane packed and exported?
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Chloromethyltrimethoxysilane is shipped as UN 1993, Class 3, Packing Group II, in compliance with relevant transportation regulations for flammable liquids. TSS exports globally.
How can I request a sample or quote for Chloromethyltrimethoxysilane?
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To request a sample or a quotation for Chloromethyltrimethoxysilane, please contact the TSS sales team via our website or designated contact channels.
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