Chloropentamethyldisilane

CAS 1560-28-7(CH3)3SiSi(CH3)2ClMicro / NanoElectronics

Chloropentamethyldisilane (CAS: 1560-28-7) is an organosilicon compound with the linear formula (CH3)3SiSi(CH3)2Cl and a molecular weight of 166.80 g/mol. This flammable liquid is primarily used as a precursor in chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes, particularly within the microelectronics and materials science industries for silicon-based applications.

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Chloropentamethyldisilane ((CH3)3SiSi(CH3)2Cl) — chemical structure, CAS 1560-28-7; Materials Science, fine chemical supplied by Tech Serve Solutions

Materials ScienceMicro/NanoElectronicsSiliconVapor Deposition Precursors

01 /Applications

CVD and ALD Precursor

Utilised as a source material in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) techniques. It enables the deposition of silicon-containing thin films crucial for microelectronic device fabrication and advanced materials.

Materials Science

Serves as a building block or intermediate in the synthesis of novel silicon-based materials. Its reactivity allows for incorporation into polymers or complex inorganic structures.

Micro/Nanoelectronics

Essential in the semiconductor industry for creating specialised layers and structures in integrated circuits. Its properties are valuable for fabricating advanced electronic components.

02 /Properties

Molecular weight	166.80
Linear formula	(CH3)3SiSi(CH3)2Cl
Assay	97%
Boiling point	134-136 °C(lit.)
Density	0.862 g/mL at 25 °C(lit.)
Refractive index	n20/D 1.4415(lit.)

03 /Safety & handling

GHS hazard pictogram: Flammable (GHS02) — Flammable

GHS hazard pictogram: Corrosive (GHS05) — Corrosive

Danger

Hazard statements

H226Flammable liquid and vapour
H314Causes severe skin burns and eye damage

Precautionary statements

P280Wear protective gloves, clothing and eye/face protection
P305IF IN EYES
P310Immediately call a POISON CENTER or doctor

Protective equipment	Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
Transport (UN / ADR)	UN 2985 8(3) / PGII
Water hazard class (WGK, DE)	3
Hazard codes (EU)	F,C
Risk statements (R)	11-14-34
Safety statements (S)	16-26-36/37/39-45
Supplemental hazards	Reacts violently with water.

Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.

04 /Identifiers & registry

CAS number

1560-28-7

MDL number

MFCD00456692

05 /Quality & supply

Documentation

Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.

Supply & logistics

Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.

06 /Frequently asked questions

What is Chloropentamethyldisilane used for?

Chloropentamethyldisilane (CAS: 1560-28-7) is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for silicon-based applications in microelectronics and materials science.

What is the CAS number and formula for Chloropentamethyldisilane?

The CAS number for Chloropentamethyldisilane is 1560-28-7, and its linear formula is (CH3)3SiSi(CH3)2Cl.

What grade and purity does Tech Serve Solutions supply?

Tech Serve Solutions supplies Chloropentamethyldisilane with a purity of 97% (assay). This product is not classified as USP, BP, or EP grade, and TSS does not represent it as such.

How should Chloropentamethyldisilane be handled safely?

Chloropentamethyldisilane is a highly flammable liquid that causes severe skin burns and eye damage, and reacts violently with water. Always handle with extreme care, wearing appropriate personal protective equipment including gloves, eye protection, and respiratory protection, and avoid contact with water. Refer to the Safety Data Sheet for detailed guidance.

How is Chloropentamethyldisilane packed and shipped?

Chloropentamethyldisilane is shipped as a dangerous good, UN 2985, Class 8(3), Packing Group II, reflecting its flammable and corrosive nature. TSS complies with all regulations for its safe export and transportation.

How can I request a quote or sample?

To request a quote or a sample of Chloropentamethyldisilane, please contact the Tech Serve Solutions sales team through our website or direct contact details provided.