Bis(diethylamido)bis(dimethylamido)titanium(IV)
Bis(diethylamido)bis(dimethylamido)titanium(IV), CAS 123798-13-0, possesses the molecular formula Ti(N(CH3)2)2(N(CH2CH3)2)2 and a molecular weight of 280.28 g/mol. This organometallic compound serves as a crucial precursor in advanced material deposition techniques. It is widely employed in chemical vapour deposition (CVD) and atomic layer deposition (ALD) for microelectronics and materials science applications, enabling the precise formation of titanium-containing thin films.
Chemical Vapor Deposition (CVD)
Utilised as a precursor for depositing thin films of titanium compounds via CVD processes. Its controlled decomposition allows for the formation of high-quality films essential in semiconductor fabrication.
Atomic Layer Deposition (ALD)
Serves as a reliable ALD precursor for depositing conformal and precise titanium-based layers. This is critical for advanced microelectronic devices and functional coatings.
Materials Science Research
Investigated for its potential in synthesising novel titanium-containing materials. Its unique structure and reactivity make it a valuable tool for materials innovation.
Microelectronics Fabrication
Key component in processes for creating advanced microelectronic and nanoelectronic devices. It facilitates the deposition of critical layers with high purity and uniformity.
| Molecular weight | 280.28 |
|---|---|
| Linear formula | Ti(N(CH3)2)2(N(CH2CH3)2)2 |
| Assay | ≥95%≥99.99% trace metals basis |
| Boiling point | 80 °C/0.1 mmHg(lit.) |
| Density | 0.931 g/mL at 25 °C(lit.) |
| Storage temperature | 2-8°C |
Hazard statements
- H225Highly flammable liquid and vapour
- H260In contact with water releases flammable gases
- H314Causes severe skin burns and eye damage
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P223Do not allow contact with water
- P231Handle under inert gas
- P280Wear protective gloves, clothing and eye/face protection
- P370In case of fire
- P422
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | -2 °C / 28.4 °F |
| Transport (UN / ADR) | UN 3398 4.3/PG 1 |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F,C |
| Risk statements (R) | 11-14/15-34 |
| Safety statements (S) | 26-36/37/39-43-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Bis(diethylamido)bis(dimethylamido)titanium(IV) used for?
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Bis(diethylamido)bis(dimethylamido)titanium(IV) is primarily used as a precursor in Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) for applications in microelectronics and materials science.
What are the CAS number and formula for this compound?
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The CAS number is 123798-13-0, and the linear formula is Ti(N(CH3)2)2(N(CH2CH3)2)2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies this compound with an assay of ≥95% and also in a high-purity grade of ≥99.99% (trace metals basis). We do not represent this product as USP, BP, or EP grade.
How should Bis(diethylamido)bis(dimethylamido)titanium(IV) be handled safely?
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This compound is classified as highly flammable and corrosive, reacting violently with water. Handle with extreme care in a well-ventilated area, wearing appropriate personal protective equipment including gloves, goggles, face shield, and a suitable respirator. Ensure ignition sources are kept away. Refer to the Safety Data Sheet for full handling instructions.
How is this product packed, shipped, and exported?
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This product is carefully packed according to international shipping regulations for hazardous materials. Tech Serve Solutions is experienced in exporting fine chemicals globally.
How can I request a sample or quote?
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To request a sample or a quote, please contact our sales team through the website or by phone, providing the product name and CAS number.
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