1,3-Diethyl-1,1,3,3-tetramethyldisilazane
1,3-Diethyl-1,1,3,3-tetramethyldisilazane (CAS: 17882-94-9), a notable organosilicon compound with the molecular formula C8H23NSi2, serves as a valuable precursor in various advanced material deposition techniques. Its chemical structure lends itself to applications in chemical synthesis and the development of specialised materials. This compound is supplied by Tech Serve Solutions for research and industrial applications requiring high-purity silicon-containing compounds.
- Synonyms
- 3,3-tetramethyldisilazaneC8H23NSi217882-94-9

Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD)
1,3-Diethyl-1,1,3,3-tetramethyldisilazane is employed as a precursor for the deposition of silicon-containing thin films. It is particularly useful in microelectronics and nanotechnology for creating specific layers in semiconductor fabrication.
Materials Science Research
This disilazane derivative can be utilised in the synthesis of novel organosilicon polymers and materials. Its controlled reactivity allows for incorporation into complex material structures with unique thermal or electronic properties.
Organosilicon Synthesis
As a versatile organosilicon reagent, it can be used in various organic synthesis pathways. Its structure provides a source of silicon atoms for building more complex organosilicon molecules.
| Molecular weight | 189.45 |
|---|---|
| Empirical formula | C8H23NSi2 |
| Assay | >98.0% |
| Boiling point | 37-39 °C/0.2 mmHg(lit.) |
| Density | 0.817 g/mL at 25 °C(lit.) |


Hazard statements
- H226Flammable liquid and vapour
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 40 °C / 104 °F |
| Transport (UN / ADR) | UN 2920 3(8) / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 10-34 |
| Safety statements (S) | 16-26-36/37/39-45 |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is 1,3-Diethyl-1,1,3,3-tetramethyldisilazane used for?
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1,3-Diethyl-1,1,3,3-tetramethyldisilazane is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for thin film deposition in microelectronics and materials science, as well as in organosilicon synthesis.
What is the CAS number and formula for 1,3-Diethyl-1,1,3,3-tetramethyldisilazane?
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The CAS number is 17882-94-9 and the empirical formula is C8H23NSi2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies 1,3-Diethyl-1,1,3,3-tetramethyldisilazane with an assay of >98.0%. TSS does not represent this product as USP, BP, EP, or any other pharmacopoeia grade.
How should 1,3-Diethyl-1,1,3,3-tetramethyldisilazane be handled?
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This compound is flammable and causes severe skin burns and eye damage (H226-H314). Handle with extreme caution using appropriate personal protective equipment, including gloves, eye protection, and respiratory protection, in a well-ventilated area. Keep away from heat and open flames.
Is 1,3-Diethyl-1,1,3,3-tetramethyldisilazane exported by TSS?
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Yes, Tech Serve Solutions is a global supplier and exporter of fine chemicals, including 1,3-Diethyl-1,1,3,3-tetramethyldisilazane, and can facilitate international shipments.
How can I request a quote or sample?
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To request a quote or sample for 1,3-Diethyl-1,1,3,3-tetramethyldisilazane, please contact the Tech Serve Solutions sales team through our website or by phone.
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