1,2-Dichlorotetramethyldisilane
1,2-Dichlorotetramethyldisilane (CAS: 4342-61-4) is an organosilicon compound with the linear formula [ClSi(CH3)2]2 and a molecular weight of 187.22 g/mol. This reactive liquid serves as a key precursor in materials science, particularly for chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes. It finds applications in microelectronics and nanotechnology for thin film deposition.
- Synonyms
- [ClSi(CH3)2]2
![1,2-Dichlorotetramethyldisilane ([ClSi(CH3)2]2) — chemical structure, CAS 4342-61-4; Materials Science, fine chemical supplied by Tech Serve Solutions](/_next/image?url=https%3A%2F%2Fpub-f4d920c906024441a773a96f7098e551.r2.dev%2Fimages%2Fproducts%2F4342-61-4.png&w=3840&q=75)
CVD and ALD Precursor
1,2-Dichlorotetramethyldisilane is utilized as a silicon-containing precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) techniques. It enables the formation of silicon-based thin films critical for semiconductor manufacturing.
Materials Science
This compound is employed in advanced materials research for the synthesis of novel silicon-containing materials. Its controlled decomposition allows for the precise engineering of material properties at the nanoscale.
Microelectronics Manufacturing
Its application extends to the microelectronics industry, where it is used in the fabrication of integrated circuits and other semiconductor devices. The precursor facilitates the deposition of high-quality dielectric or conductive layers.
| Molecular weight | 187.22 |
|---|---|
| Linear formula | [ClSi(CH3)2]2 |
| Assay | 95% |
| Boiling point | 148-149 °C(lit.) |
| Density | 1.005 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.454(lit.) |


Hazard statements
- H226Flammable liquid and vapour
- H314Causes severe skin burns and eye damage
Precautionary statements
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P310Immediately call a POISON CENTER or doctor
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 37 °C / 98.6 °F |
| Transport (UN / ADR) | UN 2986 3(8) / PGII |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 10-14-34 |
| Safety statements (S) | 26-27-36/37/39-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is 1,2-Dichlorotetramethyldisilane used for?
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1,2-Dichlorotetramethyldisilane is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for creating silicon-containing thin films in materials science and microelectronics.
What is the CAS number and formula for 1,2-Dichlorotetramethyldisilane?
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The CAS number is 4342-61-4 and the linear formula is [ClSi(CH3)2]2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies 1,2-Dichlorotetramethyldisilane with an assay of 95%. We do not represent this product as meeting USP, BP, or EP pharmacopoeia standards.
How should 1,2-Dichlorotetramethyldisilane be handled safely?
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1,2-Dichlorotetramethyldisilane is a flammable liquid and causes severe skin burns and eye damage. It reacts violently with water. Handle with extreme care, using appropriate personal protective equipment including gloves, goggles, and face shields, in a well-ventilated area, and keep away from ignition sources and water.
How is 1,2-Dichlorotetramethyldisilane packed and exported?
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As a specialist supplier and exporter, Tech Serve Solutions ensures that 1,2-Dichlorotetramethyldisilane is appropriately packed and prepared for international shipment according to all relevant transport regulations for hazardous materials.
How can I request a quote or sample for 1,2-Dichlorotetramethyldisilane?
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To request a quote or a sample of 1,2-Dichlorotetramethyldisilane, please contact our sales team through the website or by phone, providing your details and quantity requirements.
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