1,1,2,2-Tetrachloro-1,2-dimethyldisilane
1,1,2,2-Tetrachloro-1,2-dimethyldisilane (CAS 4518-98-3) is an organosilicon compound with the formula Cl4SiSi(CH3)2 and a molecular weight of 228.05 g/mol. This chemical is recognised for its utility as a precursor in advanced material deposition techniques. Its properties make it suitable for applications in microelectronics and materials science, particularly where precise silicon-based film formation is required.
- Synonyms
- 2-Tetrachloro-1,2-dimethyldisilaneCl4SiSi(CH3)2

Chemical Vapour Deposition (CVD) Precursor
Utilised in CVD processes for the deposition of silicon-containing films. Its controlled decomposition characteristics allow for thin-film growth critical in semiconductor manufacturing.
Atomic Layer Deposition (ALD) Precursor
Serves as a precursor in ALD, enabling the sequential and self-limiting deposition of ultra-thin layers. This is crucial for fabricating advanced microelectronic devices and nanostructures.
Materials Science Research
Employed in materials science for the synthesis and modification of novel silicon-based materials. Its reactivity profile facilitates the creation of specific material compositions and structures.
Micro/Nanoelectronics Fabrication
Essential in the fabrication of micro- and nanoelectronic components. It contributes to the precise layering and structuring required for integrated circuits and other advanced electronic devices.
| Molecular weight | 228.05 |
|---|---|
| Linear formula | Cl4SiSi(CH3)2 |
| Assay | 96% |
| Density | 1.269 g/mL at 25 °C(lit.) |
| Refractive index | n20/D 1.469(lit.) |
| Vapour pressure | 0.88 psi (20 °C) |


Hazard statements
- H226Flammable liquid and vapour
- H260In contact with water releases flammable gases
- H314Causes severe skin burns and eye damage
Precautionary statements
- P223Do not allow contact with water
- P231Handle under inert gas
- P280Wear protective gloves, clothing and eye/face protection
- P305IF IN EYES
- P370In case of fire
- P422
| Protective equipment | Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter |
|---|---|
| Flash point | 49 °C / 120.2 °F |
| Transport (UN / ADR) | UN 2988 8(3)(4.3) / PGI |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | C |
| Risk statements (R) | 10-14-34 |
| Safety statements (S) | 26-27-28-36/37/39-45 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is 1,1,2,2-Tetrachloro-1,2-dimethyldisilane used for?
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1,1,2,2-Tetrachloro-1,2-dimethyldisilane is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for fabricating silicon-containing films in microelectronics and materials science.
What are the CAS number and chemical formula for 1,1,2,2-Tetrachloro-1,2-dimethyldisilane?
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The CAS number is 4518-98-3, and the linear chemical formula is Cl4SiSi(CH3)2.
What grade and purity does Tech Serve Solutions supply?
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Tech Serve Solutions supplies 1,1,2,2-Tetrachloro-1,2-dimethyldisilane with an assay of 96%. We do not represent this product as USP, BP, EP, or pharmacopoeia grade.
How should 1,1,2,2-Tetrachloro-1,2-dimethyldisilane be handled?
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This compound is flammable and reacts violently with water, posing significant hazards (H226-H314-H260). Handle with extreme caution in a well-ventilated area, away from ignition sources and water. Appropriate personal protective equipment, including face shields, gloves, and suitable respiratory protection, is mandatory. Consult the Safety Data Sheet for comprehensive handling instructions.
How is 1,1,2,2-Tetrachloro-1,2-dimethyldisilane packed, shipped, and exported?
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Tech Serve Solutions ensures secure and compliant packaging for the export of 1,1,2,2-Tetrachloro-1,2-dimethyldisilane, adhering to all relevant transportation regulations for hazardous materials. Details regarding specific packaging can be provided upon request.
How can I request a quote or sample for 1,1,2,2-Tetrachloro-1,2-dimethyldisilane?
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To request a quote or a sample of 1,1,2,2-Tetrachloro-1,2-dimethyldisilane, please contact our sales department via the website or direct email, providing your specific requirements.
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