Methylsilane
Methylsilane (CAS: 992-94-9), with the chemical formula CH3SiH3 and a molecular weight of 46.14 g/mol, is an organosilicon compound. It serves as a crucial precursor in advanced material deposition techniques and chemical synthesis. Its properties make it valuable in the microelectronics industry for producing silicon-containing thin films, contributing to the development of semiconductors and other high-tech components.
Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD)
Methylsilane is utilised as a precursor in CVD and ALD processes for the deposition of silicon-containing thin films. These films are essential in the fabrication of microelectronic devices and semiconductor components.
Materials Science Research
This compound finds application in materials science for the synthesis of novel organosilicon materials and polymers. Its unique structure allows for the development of materials with specific thermal, mechanical, and electronic properties.
Chemical Synthesis
As an organosilicon reagent, methylsilane is employed in various synthetic pathways within organic and inorganic chemistry. It can be used to introduce the methylsilyl group into molecules.
| Molecular weight | 46.14 |
|---|---|
| Linear formula | CH3SiH3 |
| Assay | ≥99.9% |
| Grade | electronic grade |
| Form | liquid |
| Boiling point | −57 °C(lit.) |
| Vapour density | 0.628 (−58 °C, vs air) |
| Melting point | −157 °C(lit.) |
| Impurities tested | <50 ppm Silane (SiH4) |
Hazard statements
- H220Extremely flammable gas
- H280Contains gas under pressure; may explode if heated
- H312Harmful in contact with skin
- H332Harmful if inhaled
Precautionary statements
- P210Keep away from heat, sparks and open flames. No smoking
- P280Wear protective gloves, clothing and eye/face protection
- P410Protect from sunlight
| Protective equipment | Eyeshields, Faceshields, Gloves, half-mask respirator (EU), half-mask respirator (US), multi-purpose combination respirator cartridge (US) |
|---|---|
| Transport (UN / ADR) | UN 3161 2.1 |
| Water hazard class (WGK, DE) | 3 |
| Hazard codes (EU) | F+,Xn |
| Risk statements (R) | 12-14-20/21 |
| Safety statements (S) | 16-24-26-36/37/39 |
| Supplemental hazards | Reacts violently with water. |
Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.
Documentation
Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.
Supply & logistics
Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.
What is Methylsilane primarily used for?
+
Methylsilane is primarily used as a precursor in Chemical Vapour Deposition (CVD) and Atomic Layer Deposition (ALD) for creating silicon-containing thin films, particularly in the microelectronics industry, and in various chemical synthesis applications.
What is the CAS number and chemical formula for Methylsilane?
+
The CAS number for Methylsilane is 992-94-9, and its chemical formula is CH3SiH3.
What grade and purity does Tech Serve Solutions supply for Methylsilane?
+
Tech Serve Solutions supplies Methylsilane in electronic grade with an assay of ≥99.9%.
How should Methylsilane be handled safely?
+
Methylsilane is highly flammable and reacts violently with water, indicated by H220 (Extremely flammable gas) and H314 (Causes severe skin burns and eye damage) hazards. It should be handled with extreme caution in well-ventilated areas, away from ignition sources and water, using appropriate personal protective equipment including eyeshields, gloves, and respiratory protection.
How is Methylsilane supplied and exported?
+
Methylsilane is supplied as a liquid and is shipped according to UN 3161 2.1 regulations for flammable gases.
How can I request a quote or sample of Methylsilane?
+
To request a quote or sample of Methylsilane, please contact the TSS sales team through our website or by phone.
▶ Related products
(3-Cyanophenyl)boronic acid, neopentyl glycol ester
Organometallic Reagents
(6-Methyl-5-quinolinyl)boronic acid
C10H10BNO2
Organometallic Reagents
2-Pyridineboronic acid
C5H6BNO2
Organometallic Reagents
4-(Phenylethynyl)phenylboronic acid pinacol ester
C20H21BO2
Organometallic Reagents
4-Biphenylboronic acid
C6H5C6H4B(OH)2
Organometallic Reagents
Imidazole-2-boronic acid
C3H5BN2O2
Organometallic Reagents
Methyl(3,3,3-trifluoropropyl)cyclopolysiloxanes, mixture of tri- and tetra-
Organometallic Reagents
Methyl-tripropoxysilane
CH3Si(OCH2CH2CH3)3
Organometallic Reagents▶ Explore more
3-Methyl-1,5-di-p-tolyl-1,4-pentazadiene
Chemical Synthesis
3-Methyl-1,5-pentanediol
Chemical Synthesis
3-Methyl-1-(2-methylphenyl)-1H-pyrazol-5-amine
C11H13N3
Chemical Synthesis
3-Methyl-1-(3′-sulfoamidophenyl)-5-pyrazolone
C10H11N3O3S
Chemical Synthesis