Tris[N,N-bis(trimethylsilyl)amide]scandium(III)

CAS 37512-28-0Sc(N(Si(CH3)3)2)3Catalysis & Inorganic

Tris[N,N-bis(trimethylsilyl)amide]scandium(III) (CAS 37512-28-0) is an organometallic compound with the molecular formula Sc(N(Si(CH3)3)2)3 and a molecular weight of 526.11 g/mol. This compound is primarily utilised as a precursor in chemical vapour deposition (CVD) and atomic layer deposition (ALD) processes for thin-film applications. It is also employed in materials science and microelectronics manufacturing.

Synonyms: Sc(N(Si(CH3)3)2)3

Email us

Tris[N,N-bis(trimethylsilyl)amide]scandium(III) (Sc(N(Si(CH3)3)2)3) — chemical structure, CAS 37512-28-0; Chemistry, fine chemical supplied by Tech Serve Solutions

Chemical SynthesisMaterials ScienceMicro/NanoElectronicsScandium

01 /Applications

CVD and ALD Precursor

Tris[N,N-bis(trimethylsilyl)amide]scandium(III) serves as a volatile precursor for depositing scandium-containing thin films via chemical vapour deposition (CVD) and atomic layer deposition (ALD). These films are critical in semiconductor fabrication and advanced materials research.

Materials Science

This scandium compound finds application in materials science for the development of novel materials with specific electronic or optical properties. Its controlled decomposition allows for precise material synthesis.

Micro/Nanoelectronics

In micro- and nanoelectronics, Tris[N,N-bis(trimethylsilyl)amide]scandium(III) is used in processes requiring high-purity scandium incorporation into semiconductor layers. This contributes to the creation of advanced electronic components.

Chemical Synthesis

As a source of scandium, this compound can be used in various chemical synthesis routes, particularly where organometallic reagents are preferred. It acts as a building block for more complex inorganic or organometallic structures.

02 /Properties

Molecular weight	526.11
Linear formula	Sc(N(Si(CH3)3)2)3
Assay	97%
Melting point	169-174 °C(lit.)

03 /Safety & handling

GHS hazard pictogram: Flammable (GHS02) — Flammable

GHS hazard pictogram: Corrosive (GHS05) — Corrosive

Danger

Hazard statements

H228Flammable solid
H261In contact with water releases flammable gas
H314Causes severe skin burns and eye damage

Precautionary statements

P210Keep away from heat, sparks and open flames. No smoking
P231Handle under inert gas
P280Wear protective gloves, clothing and eye/face protection
P305IF IN EYES
P310Immediately call a POISON CENTER or doctor
P422

Protective equipment	Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges
Flash point	2 °C / 35.6 °F
Transport (UN / ADR)	UN 3396 4.3/PG 2
Water hazard class (WGK, DE)	3
Hazard codes (EU)	F,C
Risk statements (R)	11-14/15-34
Safety statements (S)	7/8-16-26-36/37/39-43-45
Supplemental hazards	Reacts violently with water.

Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.

04 /Identifiers & registry

CAS number

37512-28-0

MDL number

MFCD03427088

05 /Quality & supply

Documentation

Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.

Supply & logistics

Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.

06 /Frequently asked questions

What is Tris[N,N-bis(trimethylsilyl)amide]scandium(III) used for?

Tris[N,N-bis(trimethylsilyl)amide]scandium(III) is primarily used as a precursor in chemical vapour deposition (CVD) and atomic layer deposition (ALD) for thin-film applications in materials science and microelectronics. It also finds use in chemical synthesis.

What are the CAS number and formula for Tris[N,N-bis(trimethylsilyl)amide]scandium(III)?

The CAS number is 37512-28-0 and the formula is Sc(N(Si(CH3)3)2)3.

What grade and purity does Tech Serve Solutions supply?

Tech Serve Solutions supplies Tris[N,N-bis(trimethylsilyl)amide]scandium(III) with a minimum assay of 97%. We do not represent this product as USP, BP, EP, or other pharmacopoeia grades.

How should Tris[N,N-bis(trimethylsilyl)amide]scandium(III) be handled safely?

This compound is flammable and reacts violently with water, causing skin burns and serious eye damage. Handle with extreme caution in a dry, inert atmosphere, wearing appropriate personal protective equipment including eyeshields, gloves, and respiratory protection. Refer to the safety data sheet for full details.

How is Tris[N,N-bis(trimethylsilyl)amide]scandium(III) packed, shipped, and exported?

Tris[N,N-bis(trimethylsilyl)amide]scandium(III) is packed and shipped according to strict international regulations for hazardous materials, including UN 3396 (Class 4.3). Tech Serve Solutions has extensive experience in exporting such chemicals globally.

How can I request a quote or sample of Tris[N,N-bis(trimethylsilyl)amide]scandium(III)?

To request a quote or sample of Tris[N,N-bis(trimethylsilyl)amide]scandium(III), please contact our sales team via the website or by phone. Provide your specific requirements and delivery details.