Tris(dimethylamido)aluminum(III)

CAS 32093-39-3Al(N(CH3)2)3Micro / NanoElectronics

Tris(dimethylamido)aluminum(III), CAS 32093-39-3, with the formula Al(N(CH3)2)3, is an organoaluminum compound with a molecular weight of 159.21 g/mol. It serves as a crucial precursor in the synthesis of aluminum nitride (AlN) thin films via organometallic chemical vapour deposition (OMCVD). This compound is recognised for its utility in materials science and micro/nanoelectronics applications.

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Tris(dimethylamido)aluminum(III) (Al(N(CH3)2)3) — chemical structure, CAS 32093-39-3; Materials Science, fine chemical supplied by Tech Serve Solutions

AluminumMaterials ScienceMicro/NanoElectronicsVapor Deposition Precursors

01 /Applications

Aluminum Nitride Thin Film Deposition

Tris(dimethylamido)aluminum(III) is employed as a precursor for depositing aluminium nitride (AlN) thin films using organometallic chemical vapour deposition (OMCVD).

Materials Science

This compound finds application in advanced materials research, particularly in areas requiring the controlled synthesis of nitride-based materials.

Micro/Nanoelectronics

Its role as an OMCVD precursor makes it valuable in the fabrication of microelectronic and nanoelectronic devices where specific thin film properties are essential.

02 /Properties

Molecular weight	159.21
Linear formula	Al(N(CH3)2)3
Density	0.865 g/mL at 25 °C(lit.)
Application	Precursor to aluminum nitride (AlN) thin films by organometallic chemical vapor deposition (OMCVD).1
Melting point	82-84 °C(lit.)

03 /Safety & handling

GHS hazard pictogram: Flammable (GHS02) — Flammable

GHS hazard pictogram: Corrosive (GHS05) — Corrosive

Danger

Hazard statements

H260In contact with water releases flammable gases
H314Causes severe skin burns and eye damage

Precautionary statements

P223Do not allow contact with water
P231Handle under inert gas
P280Wear protective gloves, clothing and eye/face protection
P305IF IN EYES
P370In case of fire
P422

Protective equipment	Eyeshields, Faceshields, full-face particle respirator type N100 (US), Gloves, respirator cartridge type N100 (US), type P1 (EN143) respirator filter, type P3 (EN 143) respirator cartridges
Flash point	21 °C / 69.8 °F
Transport (UN / ADR)	UN 3131 8(4.3) / PGI
Water hazard class (WGK, DE)	3
Hazard codes (EU)	F,C
Risk statements (R)	11-14/15-34
Safety statements (S)	16-26-36/37/39-43
Supplemental hazards	Reacts violently with water.

Hazard information is provided for guidance. Always consult the product Safety Data Sheet (SDS), available on request, before handling.

04 /Identifiers & registry

CAS number

32093-39-3

MDL number

MFCD00269811

PubChem substance

24870625

05 /Quality & supply

Documentation

Every batch ships with a Certificate of Analysis covering assay, identity and purity; the grade is confirmed against your enquiry. Safety Data Sheets and technical data sheets are available on request.

Supply & logistics

Samples for technical evaluation; bulk MOQ by grade and packaging. In-stock material ships in 7–10 working days, worldwide, with full export documentation.

06 /Frequently asked questions

What is Tris(dimethylamido)aluminum(III) used for?

Tris(dimethylamido)aluminum(III) is primarily used as a precursor for depositing aluminium nitride (AlN) thin films through organometallic chemical vapour deposition (OMCVD).

What is the CAS number and chemical formula for Tris(dimethylamido)aluminum(III)?

The CAS number is 32093-39-3, and the chemical formula is Al(N(CH3)2)3.

What grade and purity does Tech Serve Solutions supply?

Tech Serve Solutions supplies Tris(dimethylamido)aluminum(III) at a purity suitable for research and development. We do not represent this product as USP, BP, or EP grade.

How should Tris(dimethylamido)aluminum(III) be handled safely?

Tris(dimethylamido)aluminum(III) is classified as Dangerous, symbolised by GHS02 and GHS05. It is flammable (flash point 21 °C) and reacts violently with water, posing a significant hazard. Strict adherence to safety protocols, including the use of appropriate personal protective equipment (eyeshields, gloves, face shield, suitable respirator) and handling under inert conditions, is mandatory.

Is Tris(dimethylamido)aluminum(III) exported by Tech Serve Solutions?

Yes, Tech Serve Solutions is a specialist global supplier and exporter of fine chemicals, including Tris(dimethylamido)aluminum(III).

How can I request a sample or quote for Tris(dimethylamido)aluminum(III)?

To request a sample or a quote, please contact our sales department through the provided channels on our website, referencing the product name and CAS number (32093-39-3).